Kenichi Sano

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Kyoto, JP

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus and method for performing predetermined processing on sub...
- Patent number 7,617,833
- Issue date Nov 17, 2009
- Dainippon Screen Mfg. Co., Ltd.
- Akira Izumi
- B08 - CLEANING
Information Patent Grant
Substrate processing method using alkaline solution and acid solution
- Patent number 7,524,771
- Issue date Apr 28, 2009
- Dainippon Screen Mfg. Co., Ltd.
- Akira Izumi
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
Substrate treating apparatus
- Publication number 20060137726
- Publication date Jun 29, 2006
- Dainippon Screen Mfg. Co., Ltd.
- Kenichi Sano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Apparatus and method for performing predetermined processing on sub...
- Publication number 20060130872
- Publication date Jun 22, 2006
- Dainippon Screen Mfg. Co., Ltd.
- Akira Izumi
- B08 - CLEANING
Information Patent Application
Substrate processing method and substrate processing apparatus
- Publication number 20040087158
- Publication date May 6, 2004
- Dainippon Screen Mfg. Co., Ltd.
- Akira Izumi
- B08 - CLEANING