Kenichi Sano

Follow

Person

Sunnyvale, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Reduction of surface and embedded substrate charge by controlled ex...
- Patent number 10,483,010
- Issue date Nov 19, 2019
- Lam Research AG
- Rafal Dylewicz
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING

Patents Applicationslast 30 patents

Information Patent Application
REDUCTION OF SURFACE AND EMBEDDED SUBSTRATE CHARGE BY CONTROLLED EX...
- Publication number 20180068754
- Publication date Mar 8, 2018
- LAM RESEARCH AG
- Rafal Dylewicz
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING