Kenichi SHIGETOMI

Person

Koshi-Shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and method of adjusting substrate pr...
- Patent number 11,476,136
- Issue date Oct 18, 2022
- Tokyo Electron Limited
- Kenichi Shigetomi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heating apparatus and substrate processing apparatus
- Patent number 10,886,151
- Issue date Jan 5, 2021
- Tokyo Electron Limited
- Kenichi Shigetomi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and method of adjusting substrate pr...
- Patent number 10,504,757
- Issue date Dec 10, 2019
- Tokyo Electron Limited
- Kenichi Shigetomi
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Heat treatment method, recording medium having recorded program for...
- Patent number 8,916,804
- Issue date Dec 23, 2014
- Tokyo Electron Limited
- Kenichi Shigetomi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heat treatment apparatus, heat treatment method and storage medium
- Patent number 8,378,272
- Issue date Feb 19, 2013
- Tokyo Electron Limited
- Kenichi Shigetomi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heat processing method, computer-readable storage medium, and heat...
- Patent number 8,138,456
- Issue date Mar 20, 2012
- Tokyo Electron Limited
- Yoshiteru Fukuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 7,049,553
- Issue date May 23, 2006
- Tokyo Electron Limited
- Kenichi Shigetomi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF ADJUSTING SUBSTRATE PR...
- Publication number 20200066559
- Publication date Feb 27, 2020
- TOKYO ELECTRON LIMITED
- Kenichi SHIGETOMI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
HEATING APPARATUS AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20180218925
- Publication date Aug 2, 2018
- TOKYO ELECTRON LIMITED
- Kenichi Shigetomi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF ADJUSTING SUBSTRATE PR...
- Publication number 20170170040
- Publication date Jun 15, 2017
- TOKYO ELECTRON LIMITED
- Kenichi SHIGETOMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATMENT METHOD, COMPUTER-READABLE STORAGE MEDIUM, AND S...
- Publication number 20150228512
- Publication date Aug 13, 2015
- TOKYO ELECTRON LIMITED
- Makoto Muramatsu
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
Heat Treatment Method, Recording Medium Having Recorded Program for...
- Publication number 20120031894
- Publication date Feb 9, 2012
- TOKYO ELECTRON LIMITED
- Kenichi Shigetomi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Heat Treatment Method, Recording Medium Having Recorded Program for...
- Publication number 20120031892
- Publication date Feb 9, 2012
- TOKYO ELECTRON LIMITED
- Kenichi Shigetomi
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
HEAT TREATMENT APPARATUS, HEAT TREATMENT METHOD AND STORAGE MEDIUM
- Publication number 20110210116
- Publication date Sep 1, 2011
- TOKYO ELECTRON LIMITED
- Kenichi SHIGETOMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEAT PROCESSING METHOD, COMPUTER-READABLE STORAGE MEDIUM, AND HEAT...
- Publication number 20070257085
- Publication date Nov 8, 2007
- TOKYO ELECTRON LIMITED
- Yoshiteru Fukuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus and substrate processing method
- Publication number 20040250762
- Publication date Dec 16, 2004
- TOKYO ELECTRON LIMITED
- Kenichi Shigetomi
- H01 - BASIC ELECTRIC ELEMENTS

Kenichi SHIGETOMI

Person

Patents Grantslast 30 patents

Substrate processing apparatus and method of adjusting substrate pr...

Heating apparatus and substrate processing apparatus

Substrate processing apparatus and method of adjusting substrate pr...

Heat treatment method, recording medium having recorded program for...

Heat treatment apparatus, heat treatment method and storage medium

Heat processing method, computer-readable storage medium, and heat...

Substrate processing apparatus and substrate processing method

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS AND METHOD OF ADJUSTING SUBSTRATE PR...

HEATING APPARATUS AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND METHOD OF ADJUSTING SUBSTRATE PR...

SUBSTRATE TREATMENT METHOD, COMPUTER-READABLE STORAGE MEDIUM, AND S...

Heat Treatment Method, Recording Medium Having Recorded Program for...

Heat Treatment Method, Recording Medium Having Recorded Program for...

HEAT TREATMENT APPARATUS, HEAT TREATMENT METHOD AND STORAGE MEDIUM

HEAT PROCESSING METHOD, COMPUTER-READABLE STORAGE MEDIUM, AND HEAT...

Substrate processing apparatus and substrate processing method