Kenichi SHIMONO

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Fushimi-ku, JP

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Patents Grantslast 30 patents

Information Patent Grant
Gas supply mechanism and semiconductor manufacturing system
- Patent number 10,950,467
- Issue date Mar 16, 2021
- Tokyo Electron Limited
- Yuki Hosaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas supply mechanism and semiconductor manufacturing system
- Patent number 10,636,683
- Issue date Apr 28, 2020
- Tokyo Electron Limited
- Yuki Hosaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion beam irradiation apparatus and substrate processing apparatus
- Patent number 10,204,766
- Issue date Feb 12, 2019
- Tokyo Electron Limited
- Yoshihiro Umezawa
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ION BEAM IRRADIATION APPARATUS AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20180108516
- Publication date Apr 19, 2018
- TOKYO ELECTRON LIMITED
- Yoshihiro UMEZAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS SUPPLY MECHANISM AND SEMICONDUCTOR MANUFACTURING SYSTEM
- Publication number 20170301568
- Publication date Oct 19, 2017
- TOKYO ELECTRON LIMITED
- Yuki HOSAKA
- H01 - BASIC ELECTRIC ELEMENTS