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last 30 patents
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Patent Grant
Exposure apparatus, exposure method, exposure apparatus maintenance...
Patent number
10,061,214
Issue date
Aug 28, 2018
Nikon Corporation
Natsuko Sagawa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure method, substrate stage, exposure apparatus, and device ma...
Patent number
9,846,371
Issue date
Dec 19, 2017
Nikon Corporation
Soichi Owa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure apparatus, and exposure method, with recovery device to re...
Patent number
9,798,245
Issue date
Oct 24, 2017
Nikon Corporation
Yasufumi Nishii
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Immersion exposure apparatus and device manufacturing method with m...
Patent number
9,645,505
Issue date
May 9, 2017
Nikon Corporation
Kenichi Shiraishi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure method, exposure apparatus, and device manufacturing method
Patent number
9,618,854
Issue date
Apr 11, 2017
Nikon Corporation
Kenichi Shiraishi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure method, exposure apparatus, and device manufacturing method
Patent number
9,335,639
Issue date
May 10, 2016
Nikon Corporation
Kenichi Shiraishi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure method, substrate stage, exposure apparatus, and device ma...
Patent number
9,268,237
Issue date
Feb 23, 2016
Nikon Corporation
Soichi Owa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure method, substrate stage, exposure apparatus, and device ma...
Patent number
9,235,139
Issue date
Jan 12, 2016
Nikon Corporation
Soichi Owa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure method, substrate stage, exposure apparatus, and device ma...
Patent number
9,019,467
Issue date
Apr 28, 2015
Nikon Corporation
Soichi Owa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure method, exposure apparatus, and device manufacturing method
Patent number
8,941,812
Issue date
Jan 27, 2015
Nikon Corporation
Kenichi Shiraishi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Maintenance method, maintenance device, exposure apparatus, and dev...
Patent number
8,891,055
Issue date
Nov 18, 2014
Nikon Corporation
Tomoharu Fujiwara
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure apparatus, method for cleaning member thereof, maintenance...
Patent number
8,810,767
Issue date
Aug 19, 2014
Nikon Corporation
Hiroyuki Nagasaka
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure apparatus and method for producing device
Patent number
8,780,327
Issue date
Jul 15, 2014
Nikon Corporation
Naoyuki Kobayashi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure apparatus and method for producing device
Patent number
8,760,617
Issue date
Jun 24, 2014
Nikon Corporation
Naoyuki Kobayashi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure apparatus, exposure method, and device manufacturing method
Patent number
8,724,077
Issue date
May 13, 2014
Nikon Corporation
Hiroyuki Nagasaka
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Immersion lithographic apparatus and method for rinsing immersion s...
Patent number
8,704,997
Issue date
Apr 22, 2014
Nikon Corporation
Kenichi Shiraishi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure apparatus, method for cleaning member thereof, maintenance...
Patent number
8,698,998
Issue date
Apr 15, 2014
Nikon Corporation
Hiroyuki Nagasaka
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure apparatus, cleaning method, and device fabricating method
Patent number
8,654,306
Issue date
Feb 18, 2014
Nikon Corporation
Kenichi Shiraishi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure method, exposure apparatus, method for producing device, a...
Patent number
8,638,422
Issue date
Jan 28, 2014
Nikon Corporation
Kenichi Shiraishi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus with cleaning of substrate table
Patent number
8,525,971
Issue date
Sep 3, 2013
Nikon Corporation
Kenichi Shiraishi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Immersion exposure apparatus and device manufacturing method with m...
Patent number
8,520,184
Issue date
Aug 27, 2013
Nikon Corporation
Kenichi Shiraishi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Maintenance method, maintenance device, exposure apparatus, and dev...
Patent number
8,456,608
Issue date
Jun 4, 2013
Nikon Corporation
Tomoharu Fujiwara
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure method, substrate stage, exposure apparatus, and device ma...
Patent number
8,384,880
Issue date
Feb 26, 2013
Nikon Corporation
Soichi Owa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure apparatus and method for producing device
Patent number
8,384,877
Issue date
Feb 26, 2013
Nikon Corporation
Naoyuki Kobayashi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure method, exposure apparatus, and device manufacturing method
Patent number
8,236,467
Issue date
Aug 7, 2012
Nikon Corporation
Kenichi Shiraishi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure method, substrate stage, exposure apparatus, and device ma...
Patent number
8,208,117
Issue date
Jun 26, 2012
Nikon Corporation
Soichi Owa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure apparatus and method for producing device
Patent number
8,174,668
Issue date
May 8, 2012
Nikon Corporation
Naoyuki Kobayashi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure apparatus and method for producing device
Patent number
8,169,592
Issue date
May 1, 2012
Nikon Corporation
Naoyuki Kobayashi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure apparatus and method for producing device
Patent number
8,130,363
Issue date
Mar 6, 2012
Nikon Corporation
Naoyuki Kobayashi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure apparatus, exposure method, and method for producing device
Patent number
8,130,361
Issue date
Mar 6, 2012
Nikon Corporation
Masahiko Yasuda
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, EXPOSURE APPARATUS MAINTENANCE...
Publication number
20180364597
Publication date
Dec 20, 2018
Nikon Corporation
Natsuko YAMAKAWA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
STAGE APPARATUS, EXPOSURE APPARATUS, AND EXPOSURE METHOD
Publication number
20180004096
Publication date
Jan 4, 2018
Nikon Corporation
Yasufumi Nishii
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXPOSURE METHOD, SUBSTRATE STAGE, EXPOSURE APPARATUS, AND DEVICE MA...
Publication number
20170329234
Publication date
Nov 16, 2017
Nikon Corporation
Soichi Owa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
IMMERSION EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD WITH M...
Publication number
20170235238
Publication date
Aug 17, 2017
Nikon Corporation
Kenichi Shiraishi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXPOSURE METHOD, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD
Publication number
20160246184
Publication date
Aug 25, 2016
Nikon Corporation
Kenichi Shiraishi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXPOSURE METHOD, SUBSTRATE STAGE, EXPOSURE APPARATUS, AND DEVICE MA...
Publication number
20150301457
Publication date
Oct 22, 2015
Nikon Corporation
Soichi Owa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
IMMERSION EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD WITH M...
Publication number
20130335717
Publication date
Dec 19, 2013
Nikon Corporation
Kenichi Shiraishi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MAINTENANCE METHOD, MAINTENANCE DEVICE, EXPOSURE APPARATUS, AND DEV...
Publication number
20130235359
Publication date
Sep 12, 2013
Nikon Corporation
Tomoharu Fujiwara
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXPOSURE APPARATUS AND METHOD FOR PRODUCING DEVICE
Publication number
20130169945
Publication date
Jul 4, 2013
Nikon Corporation
Naoyuki Kobayashi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXPOSURE METHOD, SUBSTRATE STAGE, EXPOSURE APPARATUS, AND DEVICE MA...
Publication number
20130141703
Publication date
Jun 6, 2013
Nikon Corporation
Soichi Owa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXPOSURE METHOD, SUBSTRATE STAGE, EXPOSURE APPARATUS, AND DEVICE MA...
Publication number
20130141701
Publication date
Jun 6, 2013
Nikon Corporation
Soichi Owa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, DEVICE-MANUFACTURING METHOD, P...
Publication number
20130057837
Publication date
Mar 7, 2013
Nikon Corporation
Go ICHINOSE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, EXPOSURE APPARATUS MAINTENANCE...
Publication number
20120314193
Publication date
Dec 13, 2012
Nikon Corporation
Natsuko Sagawa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXPOSURE METHOD, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD
Publication number
20120274915
Publication date
Nov 1, 2012
Nikon Corporation
Kenichi Shiraishi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD FOR PRODUCING DEVICE
Publication number
20120120381
Publication date
May 17, 2012
Nikon Corporation
Masahiko Yasuda
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
CLEANING METHOD, DEVICE MANUFACTURING METHOD, EXPOSURE APPARATUS, A...
Publication number
20120062858
Publication date
Mar 15, 2012
Nikon Corporation
Ryo TANAKA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD
Publication number
20120062861
Publication date
Mar 15, 2012
Nikon Corporation
Hiroyuki Nagasaka
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Cleaning method, device manufacturing method, cleaning substrate, l...
Publication number
20120057139
Publication date
Mar 8, 2012
Nikon Corporation
Akikazu TANIMOTO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Exposure method, exposure apparatus, and device manufacturing method
Publication number
20120044469
Publication date
Feb 23, 2012
Nikon Corporation
Kenichi Shiraishi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Exposure apparatus and method for producing device
Publication number
20110199594
Publication date
Aug 18, 2011
Nikon Corporation
Naoyuki Kobayashi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Stage apparatus, exposure apparatus, and exposure method
Publication number
20110080574
Publication date
Apr 7, 2011
Nikon Corporation
Yasufumi Nishii
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Maintenance method, maintenance device, exposure apparatus, and dev...
Publication number
20100315609
Publication date
Dec 16, 2010
Nikon Corporation
Tomoharu Fujiwara
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Exposure apparatus, method for cleaning member thereof, maintenance...
Publication number
20100134772
Publication date
Jun 3, 2010
Nikon Corporation
Hiroyuki Nagasaka
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Cleaning tool, cleaning method, and device fabricating method
Publication number
20100039628
Publication date
Feb 18, 2010
Nikon Corporation
Kenichi Shiraishi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Exposure apparatus, cleaning method, and device fabricating method
Publication number
20090316120
Publication date
Dec 24, 2009
Nikon Corporation
Kenichi Shiraishi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Exposure method, exposure apparatus, and device manufacturing method
Publication number
20090305150
Publication date
Dec 10, 2009
Nikon Corporation
Kenichi Shiraishi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Exposure apparatus, device manufacturing method, maintenance method...
Publication number
20090244503
Publication date
Oct 1, 2009
Nikon Corporation
Kenichi SHIRAISHI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Exposure apparatus, method for cleaning member thereof , maintenanc...
Publication number
20090225286
Publication date
Sep 10, 2009
Nikon Corporation
Hiroyuki Nagasaka
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Exposure apparatus, method for cleaning member thereof, maintenance...
Publication number
20090218653
Publication date
Sep 3, 2009
Nikon Corporation
Hiroyuki Nagasaka
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Exposure Method, Exposure Apparatus and Method for Fabricating Device
Publication number
20090153813
Publication date
Jun 18, 2009
Kenichi Shiraishi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY