Kenichi Suematsu

Person

Kanagawa-ken, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Electron-beam irradiated area adjustment method and adjustment syst...
- Patent number 10,446,404
- Issue date Oct 15, 2019
- Ebara Corporation
- Ryo Tajima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inspection system and inspection image data generation method
- Patent number 10,074,510
- Issue date Sep 11, 2018
- Ebara Corporation
- Kenichi Suematsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inspection device
- Patent number 10,002,740
- Issue date Jun 19, 2018
- Ebara Corporation
- Masahiro Hatakeyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Surface processing apparatus
- Patent number 9,852,878
- Issue date Dec 26, 2017
- Ebara Corporation
- Masahiro Hatakeyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Control unit for generating timing signal for imaging unit in inspe...
- Patent number 9,760,984
- Issue date Sep 12, 2017
- Ebara Corporation
- Kenichi Suematsu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Testing apparatus using charged particles and device manufacturing...
- Patent number 9,406,480
- Issue date Aug 2, 2016
- Ebara Corporation
- Nobuharu Noji
- G01 - MEASURING TESTING
Information Patent Grant
Inspection system, inspection image data generation method, inspect...
- Patent number 9,105,445
- Issue date Aug 11, 2015
- Ebara Corporation
- Ryo Tajima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Testing apparatus using charged particles and device manufacturing...
- Patent number 8,946,631
- Issue date Feb 3, 2015
- Ebara Corporation
- Nobuharu Noji
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Detector and inspecting apparatus
- Patent number 8,796,621
- Issue date Aug 5, 2014
- Ebara Corporation
- Masahiro Hatakeyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Testing apparatus using charged particles and device manufacturing...
- Patent number 8,742,341
- Issue date Jun 3, 2014
- Ebara Corporation
- Nobuharu Noji
- G01 - MEASURING TESTING
Information Patent Grant
Detector and inspecting apparatus
- Patent number 8,431,892
- Issue date Apr 30, 2013
- Ebara Corporation
- Masahiro Hatakeyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Detector and inspecting apparatus
- Patent number 7,928,382
- Issue date Apr 19, 2011
- Ebara Corporation
- Masahiro Hatakeyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Testing apparatus using charged particles and device manufacturing...
- Patent number 7,741,601
- Issue date Jun 22, 2010
- Ebara Corporation
- Nobuharu Noji
- G01 - MEASURING TESTING
Information Patent Grant
Electron beam apparatus, a device manufacturing method using the sa...
- Patent number 7,425,703
- Issue date Sep 16, 2008
- Ebara Corporation
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Grant
Testing apparatus using charged particles and device manufacturing...
- Patent number 7,365,324
- Issue date Apr 29, 2008
- Ebara Corporation
- Nobuharu Noji
- G01 - MEASURING TESTING
Information Patent Grant
Testing apparatus using charged particles and device manufacturing...
- Patent number 7,138,629
- Issue date Nov 21, 2006
- Ebara Corporation
- Nobuharu Noji
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
ELECTRON-BEAM IRRADIATED AREA ADJUSTMENT METHOD AND ADJUSTMENT SYST...
- Publication number 20180233374
- Publication date Aug 16, 2018
- EBARA CORPORATION
- Ryo TAJIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INSPECTION DEVICE
- Publication number 20180040452
- Publication date Feb 8, 2018
- EBARA CORPORATION
- Masahiro HATAKEYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SURFACE PROCESSING APPARATUS
- Publication number 20150371813
- Publication date Dec 24, 2015
- EBARA CORPORATION
- Masahiro HATAKEYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONTROL UNIT FOR GENERATING TIMING SIGNAL FOR IMAGING UNIT IN INSPE...
- Publication number 20150285746
- Publication date Oct 8, 2015
- EBARA CORPORATION
- Kenichi SUEMATSU
- G01 - MEASURING TESTING
Information Patent Application
TESTING APPARATUS USING CHARGED PARTICLES AND DEVICE MANUFACTURING...
- Publication number 20150122993
- Publication date May 7, 2015
- EBARA CORPORATION
- Nobuharu Noji
- G01 - MEASURING TESTING
Information Patent Application
INSPECTION SYSTEM AND INSPECTION IMAGE DATA GENERATION METHOD
- Publication number 20150041646
- Publication date Feb 12, 2015
- EBARA CORPORATION
- Kenichi Suematsu
- G01 - MEASURING TESTING
Information Patent Application
INSPECTION SYSTEM, INSPECTION IMAGE DATA GENERATION METHOD, INSPECT...
- Publication number 20140291515
- Publication date Oct 2, 2014
- Ryo TAJIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TESTING APPARATUS USING CHARGED PARTICLES AND DEVICE MANUFACTURING...
- Publication number 20140158885
- Publication date Jun 12, 2014
- EBARA CORPORATION
- Nobuharu Noji
- G01 - MEASURING TESTING
Information Patent Application
DETECTOR AND INSPECTING APPARATUS
- Publication number 20130228684
- Publication date Sep 5, 2013
- EBARA CORPORATION
- Masahiro Hatakeyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DETECTOR AND INSPECTING APPARATUS
- Publication number 20110024623
- Publication date Feb 3, 2011
- EBARA CORPORATION
- Masahiro Hatakeyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Testing apparatus using charged particles and device manufacturing...
- Publication number 20100237243
- Publication date Sep 23, 2010
- EBARA CORPORATION
- Nobuharu Noji
- G01 - MEASURING TESTING
Information Patent Application
DETECTOR AND INSPECTING APPARATUS
- Publication number 20090224151
- Publication date Sep 10, 2009
- EBARA CORPORATION
- Masahiro Hatakeyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Testing apparatus using charged particles and device manufacturing...
- Publication number 20090101816
- Publication date Apr 23, 2009
- EBARA CORPORATION
- Nobuharu Noji
- G01 - MEASURING TESTING
Information Patent Application
Electron beam apparatus, a device manufacturing method using the sa...
- Publication number 20080315095
- Publication date Dec 25, 2008
- EBARA CORPORATION
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Application
Testing apparatus using charged particles and device manufacturing...
- Publication number 20060169900
- Publication date Aug 3, 2006
- EBARA CORPORATION
- Nobuharu Noji
- G01 - MEASURING TESTING
Information Patent Application
Electron beam apparatus, a device manufacturing method using the sa...
- Publication number 20050214958
- Publication date Sep 29, 2005
- EBARA CORPORATION
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Application
Testing apparatus using charged particles and device manufacturing...
- Publication number 20050045821
- Publication date Mar 3, 2005
- Nobuharu Noji
- G01 - MEASURING TESTING

Kenichi Suematsu

Person

Patents Grantslast 30 patents

Electron-beam irradiated area adjustment method and adjustment syst...

Inspection system and inspection image data generation method

Inspection device

Surface processing apparatus

Control unit for generating timing signal for imaging unit in inspe...

Testing apparatus using charged particles and device manufacturing...

Inspection system, inspection image data generation method, inspect...

Testing apparatus using charged particles and device manufacturing...

Detector and inspecting apparatus

Testing apparatus using charged particles and device manufacturing...

Detector and inspecting apparatus

Detector and inspecting apparatus

Testing apparatus using charged particles and device manufacturing...

Electron beam apparatus, a device manufacturing method using the sa...

Testing apparatus using charged particles and device manufacturing...

Testing apparatus using charged particles and device manufacturing...

Patents Applicationslast 30 patents

ELECTRON-BEAM IRRADIATED AREA ADJUSTMENT METHOD AND ADJUSTMENT SYST...

INSPECTION DEVICE

SURFACE PROCESSING APPARATUS

CONTROL UNIT FOR GENERATING TIMING SIGNAL FOR IMAGING UNIT IN INSPE...

TESTING APPARATUS USING CHARGED PARTICLES AND DEVICE MANUFACTURING...

INSPECTION SYSTEM AND INSPECTION IMAGE DATA GENERATION METHOD

INSPECTION SYSTEM, INSPECTION IMAGE DATA GENERATION METHOD, INSPECT...

TESTING APPARATUS USING CHARGED PARTICLES AND DEVICE MANUFACTURING...

DETECTOR AND INSPECTING APPARATUS

DETECTOR AND INSPECTING APPARATUS

Testing apparatus using charged particles and device manufacturing...

DETECTOR AND INSPECTING APPARATUS

Testing apparatus using charged particles and device manufacturing...

Electron beam apparatus, a device manufacturing method using the sa...

Testing apparatus using charged particles and device manufacturing...

Electron beam apparatus, a device manufacturing method using the sa...

Testing apparatus using charged particles and device manufacturing...