Kenichi SUZAKI

Person

Toyama Shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Vaporizer, substrate processing apparatus and method for manufactur...
- Patent number 11,970,771
- Issue date Apr 30, 2024
- Kokusai Electric Corporation
- Atsushi Morikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, substrate support, and method of ma...
- Patent number 11,929,272
- Issue date Mar 12, 2024
- Kokusai Electric Corporation
- Kenichi Suzaki
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Vaporizer, substrate processing apparatus and method of manufacturi...
- Patent number 11,873,555
- Issue date Jan 16, 2024
- Kokusai Electric Corporation
- Gen Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vaporizer, substrate processing apparatus, and method of manufactur...
- Patent number 11,866,822
- Issue date Jan 9, 2024
- Kokusai Electric Corporation
- Hirohisa Yamazaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, method for manufacturing semiconduc...
- Patent number 11,293,096
- Issue date Apr 5, 2022
- Kokusai Electric Corporation
- Atsushi Morikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and precursor gas nozzle
- Patent number 11,020,760
- Issue date Jun 1, 2021
- Kokusai Electric Corporation
- Toshiki Fujino
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate processing apparatus, liquid precursor replenishment syst...
- Patent number 10,876,207
- Issue date Dec 29, 2020
- Kokusai Electric Corporation
- Noriyuki Isobe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas supply nozzle
- Patent number D828091
- Issue date Sep 11, 2018
- Hitachi Kokusai Electric, Inc.
- Toshiki Fujino
- D07 - Equipment for preparing or serving food or drink not elsewhere specified
Information Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
- Patent number 9,970,112
- Issue date May 15, 2018
- Hitachi Kokusai Electric Inc.
- Yasunobu Koshi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 9,708,708
- Issue date Jul 18, 2017
- Hitachi Kokusai Electric, Inc.
- Noriyuki Isobe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 9,390,916
- Issue date Jul 12, 2016
- Hitachi Kokusai Electric Inc.
- Yoshiro Hirose
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 9,093,270
- Issue date Jul 28, 2015
- Hitachi Kokusai Electric Inc.
- Yoshiro Hirose
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
- Patent number 8,999,858
- Issue date Apr 7, 2015
- Hitachi Kokusai Electric Inc.
- Yasunobu Koshi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Producing method of semiconductor device and substrate processing a...
- Patent number 8,636,882
- Issue date Jan 28, 2014
- Hitachi Kokusai Electric Inc.
- Kenichi Suzaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 8,231,731
- Issue date Jul 31, 2012
- Hitachi Kokusai Electric, Inc.
- Kenichi Suzaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device and apparatus for proc...
- Patent number 8,227,030
- Issue date Jul 24, 2012
- Hitachi Kokusai Electric Inc.
- Takaaki Noda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device and apparatus for proc...
- Patent number 8,221,835
- Issue date Jul 17, 2012
- Hitachi Kokusai Electric Inc.
- Takaaki Noda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate treating apparatus and method for manufacturing semicondu...
- Patent number 8,211,798
- Issue date Jul 3, 2012
- Hitachi Kokusai Electric Inc.
- Takashi Ozaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Producing method of a semiconductor device using CVD processing
- Patent number 7,955,991
- Issue date Jun 7, 2011
- Hitachi Kokussai Electric Inc.
- Kenichi Suzaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate treating apparatus and method for manufacturing semicondu...
- Patent number 7,915,165
- Issue date Mar 29, 2011
- Hitachi Kokusai Electric Inc.
- Takashi Ozaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate treating apparatus and method for manufacturing semicondu...
- Patent number 7,737,034
- Issue date Jun 15, 2010
- Hitachi Kokusai Electric Inc.
- Takashi Ozaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate treating apparatus and semiconductor device manufacturing...
- Patent number 7,731,797
- Issue date Jun 8, 2010
- Hitachi Kokusai Electric Inc.
- Seiyo Nakashima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device and apparatus for proc...
- Patent number 7,556,839
- Issue date Jul 7, 2009
- Hitachi Kokusai Electric Inc.
- Takaaki Noda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for manufacturing semiconductor device
- Patent number 6,790,793
- Issue date Sep 14, 2004
- Hitachi Kokusai Electric Inc.
- Yutaka Nishino
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for fabricating a semiconductor device and a substrate proce...
- Patent number 6,720,274
- Issue date Apr 13, 2004
- Hitachi Kokusai Electric Inc.
- Takashi Ozaki
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
VAPORIZER, PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICON...
- Publication number 20240093361
- Publication date Mar 21, 2024
- Kokusai Electric Corporation
- Gen LI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, LIQUID SOURCE REPLENISHMENT SYSTEM,...
- Publication number 20230332287
- Publication date Oct 19, 2023
- Kokusai Electric Corporation
- Kenichi SUZAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20230304149
- Publication date Sep 28, 2023
- Kokusai Electric Corporation
- Kenichi SUZAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CLEANING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, RECO...
- Publication number 20230223247
- Publication date Jul 13, 2023
- Kokusai Electric Corporation
- Yuma IKEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, METHOD OF PROCESSING...
- Publication number 20230098746
- Publication date Mar 30, 2023
- Kokusai Electric Corporation
- Yoshimasa NAGATOMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, CLEANING METHOD, AND METHOD OF MANU...
- Publication number 20230096542
- Publication date Mar 30, 2023
- Kokusai Electric Corporation
- Kenichi SUZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, EXHAUST DEVICE AND METHOD OF MANUFA...
- Publication number 20220403511
- Publication date Dec 22, 2022
- Kokusai Electric Corporation
- Hirohisa YAMAZAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD FOR MANUFACTURING SEMICONDUC...
- Publication number 20220186368
- Publication date Jun 16, 2022
- Hitachi Kokusai Electric Inc.
- Atsushi MORIKAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20220093386
- Publication date Mar 24, 2022
- Kokusai Electric Corporation
- Kazuki NONOMURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPORIZER, SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURI...
- Publication number 20210292895
- Publication date Sep 23, 2021
- Kokusai Electric Corporation
- Gen LI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CLEANING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND...
- Publication number 20210193486
- Publication date Jun 24, 2021
- Kokusai Electric Corporation
- Gen LI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VAPORIZER, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF MANUFACTUR...
- Publication number 20210079523
- Publication date Mar 18, 2021
- Kokusai Electric Corporation
- Hirohisa YAMAZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE SUPPORT, AND METHOD OF MA...
- Publication number 20210035835
- Publication date Feb 4, 2021
- Kokusai Electric Corporation
- Kenichi Suzaki
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, LIQUID PRECURSOR REPLENISHMENT SYST...
- Publication number 20190211449
- Publication date Jul 11, 2019
- Hitachi Kokusai Electric Inc.
- Noriyuki ISOBE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD FOR MANUFACTURING SEMICONDUC...
- Publication number 20180135176
- Publication date May 17, 2018
- Hitachi Kokusai Electric Inc.
- Atsushi MORIKAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND PRECURSOR GAS NOZZLE
- Publication number 20170232457
- Publication date Aug 17, 2017
- Hitachi Kokusai Electric Inc.
- Toshiki FUJINO
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
Method of Manufacturing Semiconductor Device
- Publication number 20170067159
- Publication date Mar 9, 2017
- Hitachi Kokusai Electric Inc.
- Noriyuki ISOBE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20150287594
- Publication date Oct 8, 2015
- Hitachi Kokusai Electric Inc.
- Yoshiro HIROSE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Processing Apparatus and Method of Manufacturing Semicond...
- Publication number 20150176130
- Publication date Jun 25, 2015
- Hitachi Kokusai Electric Inc.
- Yasunobu Koshi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20140179085
- Publication date Jun 26, 2014
- Hitachi Kokusai Electric Inc.
- Yoshiro HIROSE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Processing Apparatus and Method of Manufacturing Semicond...
- Publication number 20130164943
- Publication date Jun 27, 2013
- Hitachi Kokusai Electric Inc.
- Yasunobu Koshi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF PROCESSING SUBSTRATE
- Publication number 20120052203
- Publication date Mar 1, 2012
- Hitachi Kokusai Electric Inc.
- Tomoyasu Miyashita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PRODUCING METHOD OF SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSING A...
- Publication number 20110239936
- Publication date Oct 6, 2011
- Kenichi SUZAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...
- Publication number 20110217852
- Publication date Sep 8, 2011
- Hitachi Kokusai Electric Inc.
- Kenichi SUZAKI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Substrate treating apparatus and method for manufacturing semicondu...
- Publication number 20110131804
- Publication date Jun 9, 2011
- Hitachi Kokusai Electric Inc.
- Takashi Ozaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate treating apparatus and method for manufacturing semicondu...
- Publication number 20100201055
- Publication date Aug 12, 2010
- Hitachi Kokusai Electric Inc.
- Takashi Ozaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PRODUCING METHOD OF SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSING A...
- Publication number 20090239386
- Publication date Sep 24, 2009
- Kenichi SUZAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of manufacturing semiconductor device and apparatus for proc...
- Publication number 20090205567
- Publication date Aug 20, 2009
- Hitachi Kokusai Electric Inc.
- Takaaki Noda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of manufacturing semiconductor device and apparatus for proc...
- Publication number 20090181523
- Publication date Jul 16, 2009
- Hitachi Kokusai Electric Inc.
- Takaaki Noda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of manufacturing semiconductor device and apparatus for proc...
- Publication number 20090181524
- Publication date Jul 16, 2009
- Hitachi Kokusai Electric Inc.
- Takaaki Noda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Kenichi SUZAKI

Person

Patents Grantslast 30 patents

Vaporizer, substrate processing apparatus and method for manufactur...

Substrate processing apparatus, substrate support, and method of ma...

Vaporizer, substrate processing apparatus and method of manufacturi...

Vaporizer, substrate processing apparatus, and method of manufactur...

Substrate processing apparatus, method for manufacturing semiconduc...

Substrate processing apparatus and precursor gas nozzle

Substrate processing apparatus, liquid precursor replenishment syst...

Gas supply nozzle

Substrate processing apparatus and method of manufacturing semicond...

Method of manufacturing semiconductor device

Method of manufacturing semiconductor device, substrate processing...

Method of manufacturing semiconductor device, substrate processing...

Substrate processing apparatus and method of manufacturing semicond...

Producing method of semiconductor device and substrate processing a...

Substrate processing apparatus

Method of manufacturing semiconductor device and apparatus for proc...

Method of manufacturing semiconductor device and apparatus for proc...

Substrate treating apparatus and method for manufacturing semicondu...

Producing method of a semiconductor device using CVD processing

Substrate treating apparatus and method for manufacturing semicondu...

Substrate treating apparatus and method for manufacturing semicondu...

Substrate treating apparatus and semiconductor device manufacturing...

Method of manufacturing semiconductor device and apparatus for proc...

Method for manufacturing semiconductor device

Method for fabricating a semiconductor device and a substrate proce...

Patents Applicationslast 30 patents

VAPORIZER, PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICON...

SUBSTRATE PROCESSING APPARATUS, LIQUID SOURCE REPLENISHMENT SYSTEM,...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

CLEANING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, RECO...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, METHOD OF PROCESSING...

SUBSTRATE PROCESSING APPARATUS, CLEANING METHOD, AND METHOD OF MANU...

SUBSTRATE PROCESSING APPARATUS, EXHAUST DEVICE AND METHOD OF MANUFA...

SUBSTRATE PROCESSING APPARATUS, METHOD FOR MANUFACTURING SEMICONDUC...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

VAPORIZER, SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURI...

CLEANING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND...

VAPORIZER, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF MANUFACTUR...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE SUPPORT, AND METHOD OF MA...

SUBSTRATE PROCESSING APPARATUS, LIQUID PRECURSOR REPLENISHMENT SYST...

SUBSTRATE PROCESSING APPARATUS, METHOD FOR MANUFACTURING SEMICONDUC...

SUBSTRATE PROCESSING APPARATUS AND PRECURSOR GAS NOZZLE

Method of Manufacturing Semiconductor Device

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

Substrate Processing Apparatus and Method of Manufacturing Semicond...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

Substrate Processing Apparatus and Method of Manufacturing Semicond...

SUBSTRATE PROCESSING APPARATUS AND METHOD OF PROCESSING SUBSTRATE

PRODUCING METHOD OF SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSING A...

SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...

Substrate treating apparatus and method for manufacturing semicondu...

Substrate treating apparatus and method for manufacturing semicondu...

PRODUCING METHOD OF SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSING A...

Method of manufacturing semiconductor device and apparatus for proc...

Method of manufacturing semiconductor device and apparatus for proc...

Method of manufacturing semiconductor device and apparatus for proc...