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last 30 patents
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Patent Grant
Hydrophobization treatment apparatus, hydrophobization treatment me...
Patent number
9,695,513
Issue date
Jul 4, 2017
Tokyo Electron Limited
Kenichi Ueda
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate processing method, non-transitory storage medium and heat...
Patent number
9,558,960
Issue date
Jan 31, 2017
Tokyo Electron Limited
Takahiro Shiozawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing method, substrate processing apparatus, and st...
Patent number
9,552,987
Issue date
Jan 24, 2017
Tokyo Electron Limited
Yuichiro Miyata
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20240038533
Publication date
Feb 1, 2024
TOKYO ELECTRON LIMITED
Hiroki TADATOMO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Substrate processing method, non-transitory storage medium and heat...
Publication number
20160189974
Publication date
Jun 30, 2016
TOKYO ELECTRON LIMITED
Takahiro Shiozawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HYDROPHOBIZATION TREATMENT APPARATUS, HYDROPHOBIZATION TREATMENT ME...
Publication number
20150361559
Publication date
Dec 17, 2015
TOKYO ELECTRON LIMITED
Kenichi Ueda
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND ST...
Publication number
20140363976
Publication date
Dec 11, 2014
TOKYO ELECTRON LIMITED
Yuichiro MIYATA
H01 - BASIC ELECTRIC ELEMENTS