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DC or HF ion source
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Patent number 5,369,337
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Issue date Nov 29, 1994
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Mitsubishi Jukogyo Kabushiki Kaisha
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Kenichi Yanagi
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H01 - BASIC ELECTRIC ELEMENTS
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Vacuum vapor deposition apparatus
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Patent number 5,169,451
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Issue date Dec 8, 1992
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Mitsubishi Jukogyo Kabushiki Kaisha
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Kenichi Yanagi
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Vacuum evaporation coating equipment
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Patent number 4,649,860
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Issue date Mar 17, 1987
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Mitsubishi Jukogyo Kabushiki Kaisha
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Heisaburo Furukawa
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Vacuum vapor deposition system
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Patent number 4,552,092
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Issue date Nov 12, 1985
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Mitsubishi Jukogyo Kabushiki Kaisha
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Kenichi Yanagi
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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