Kenichiro Mori

Person

Tochigi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Forming method and method of manufacturing article
- Patent number 9,564,374
- Issue date Feb 7, 2017
- Canon Kabushiki Kaisha
- Masaki Mizutani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lithography apparatus, and method of manufacturing article
- Patent number 9,529,270
- Issue date Dec 27, 2016
- Canon Kabushiki Kaisha
- Kenichiro Mori
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and method of manufacturing article
- Patent number 8,760,627
- Issue date Jun 24, 2014
- Canon Kabushiki Kaisha
- Kenichiro Mori
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination optical system, exposure apparatus, and device manufac...
- Patent number 8,576,378
- Issue date Nov 5, 2013
- Canon Kabushiki Kaisha
- Kenichiro Mori
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, exposure method, and device fabrication method
- Patent number 7,936,442
- Issue date May 3, 2011
- Canon Kabushiki Kaisha
- Kenichiro Mori
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure method
- Patent number 7,771,906
- Issue date Aug 10, 2010
- Canon Kabushiki Kaisha
- Hiroto Yoshii
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus
- Patent number 7,602,474
- Issue date Oct 13, 2009
- Canon Kabushiki Kaisha
- Kenichiro Mori
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination optical system, exposure apparatus, and device fabrica...
- Patent number 7,206,060
- Issue date Apr 17, 2007
- Canon Kabushiki Kaisha
- Kenichiro Mori
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus
- Patent number 7,130,024
- Issue date Oct 31, 2006
- Canon Kabushiki Kaisha
- Kenichiro Shinoda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination optical system and exposure apparatus having the same
- Patent number 7,126,673
- Issue date Oct 24, 2006
- Canon Kabushiki Kaisha
- Kenichiro Mori
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Three-dimensional structure forming method
- Patent number 7,027,227
- Issue date Apr 11, 2006
- Canon Kabushiki Kaisha
- Keiko Chiba
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Illumination optical system for use in projection exposure apparatus
- Patent number 6,903,801
- Issue date Jun 7, 2005
- Canon Kabushiki Kaisha
- Kenichiro Mori
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure method and apparatus
- Patent number 6,842,224
- Issue date Jan 11, 2005
- Canon Kabushiki Kaisha
- Kenichiro Mori
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure amount control method in exposure apparatus
- Patent number 6,803,991
- Issue date Oct 12, 2004
- Canon Kabushiki Kaisha
- Kenichiro Mori
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination system for use in exposure apparatus
- Patent number 6,639,652
- Issue date Oct 28, 2003
- Canon Kabushiki Kaisha
- Kenichiro Mori
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure control method, exposure apparatus and device manufacturin...
- Patent number 6,573,977
- Issue date Jun 3, 2003
- Canon Kabushiki Kaisha
- Kenichiro Mori
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure control method, exposure apparatus and device manufacturin...
- Patent number 6,337,734
- Issue date Jan 8, 2002
- Canon Kabushiki Kaisha
- Kenichiro Mori
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
BONDING METHOD, BONDING APPARATUS, ARTICLE MANUFACTURING METHOD, DE...
- Publication number 20240243094
- Publication date Jul 18, 2024
- Canon Kabushiki Kaisha
- MASAHIRO KIMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BONDING APPARATUS, BONDING METHOD AND ARTICLE MANUFACTURING METHOD
- Publication number 20240227316
- Publication date Jul 11, 2024
- Canon Kabushiki Kaisha
- KAI TAKAHASHI
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
STORAGE CONTAINER, PROCESSING APPARATUS, BONDING APPARATUS, PROCESS...
- Publication number 20240213211
- Publication date Jun 27, 2024
- Canon Kabushiki Kaisha
- KENICHIRO MORI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BONDING APPARATUS, BONDING METHOD, AND ARTICLE MANUFACTURING METHOD
- Publication number 20240194636
- Publication date Jun 13, 2024
- Canon Kabushiki Kaisha
- KENICHIRO MORI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BONDING APPARATUS, BONDING METHOD AND ARTICLE MANUFACTURING METHOD
- Publication number 20240131805
- Publication date Apr 25, 2024
- Canon Kabushiki Kaisha
- KAI TAKAHASHI
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
BONDING APPARATUS AND BONDING METHOD
- Publication number 20230207368
- Publication date Jun 29, 2023
- Canon Kabushiki Kaisha
- Kenichiro MORI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FORMING METHOD AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20150262890
- Publication date Sep 17, 2015
- Canon Kabushiki Kaisha
- Masaki Mizutani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LITHOGRAPHY APPARATUS, AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20150050813
- Publication date Feb 19, 2015
- Canon Kabushiki Kaisha
- Kenichiro Mori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LITHOGRAPHIC APPARATUS AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20110267595
- Publication date Nov 3, 2011
- Canon Kabushiki Kaisha
- Kenichiro Mori
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE METHOD
- Publication number 20090180097
- Publication date Jul 16, 2009
- Hiroto YOSHII
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE MANUFAC...
- Publication number 20090086185
- Publication date Apr 2, 2009
- Canon Kabushiki Kaisha
- Kenichiro Mori
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS
- Publication number 20080123055
- Publication date May 29, 2008
- Canon Kabushiki Kaisha
- Kenichiro Mori
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE FABRICATION METHOD
- Publication number 20080123068
- Publication date May 29, 2008
- Canon Kabushiki Kaisha
- Kenichiro Mori
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20080036992
- Publication date Feb 14, 2008
- Canon Kabushiki Kaisha
- Kenichiro Mori
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE METHOD
- Publication number 20070035716
- Publication date Feb 15, 2007
- Hiroto YOSHII
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Illumination optical system, exposure apparatus and device fabricat...
- Publication number 20050237527
- Publication date Oct 27, 2005
- Kenichiro Mori
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Illumination optical system and exposure apparatus having the same
- Publication number 20050219498
- Publication date Oct 6, 2005
- Kenichiro Mori
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus
- Publication number 20050024619
- Publication date Feb 3, 2005
- Kenichiro Shinoda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Three-dimensional structure forming method
- Publication number 20040152021
- Publication date Aug 5, 2004
- Canon Kabushiki Kaisha
- Keiko Chiba
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
Exposure method and apparatus
- Publication number 20040021841
- Publication date Feb 5, 2004
- Kenichiro Mori
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Illumination optical system for use in projection exposure apparatus
- Publication number 20010043318
- Publication date Nov 22, 2001
- Kenichiro Mori
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure amount control method in exposure apparatus
- Publication number 20010028448
- Publication date Oct 11, 2001
- Kenichiro Mori
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Kenichiro Mori

Person

Patents Grantslast 30 patents

Forming method and method of manufacturing article

Lithography apparatus, and method of manufacturing article

Lithographic apparatus and method of manufacturing article

Illumination optical system, exposure apparatus, and device manufac...

Exposure apparatus, exposure method, and device fabrication method

Exposure method

Exposure apparatus

Illumination optical system, exposure apparatus, and device fabrica...

Exposure apparatus

Illumination optical system and exposure apparatus having the same

Three-dimensional structure forming method

Illumination optical system for use in projection exposure apparatus

Exposure method and apparatus

Exposure amount control method in exposure apparatus

Illumination system for use in exposure apparatus

Exposure control method, exposure apparatus and device manufacturin...

Exposure control method, exposure apparatus and device manufacturin...

Patents Applicationslast 30 patents

BONDING METHOD, BONDING APPARATUS, ARTICLE MANUFACTURING METHOD, DE...

BONDING APPARATUS, BONDING METHOD AND ARTICLE MANUFACTURING METHOD

STORAGE CONTAINER, PROCESSING APPARATUS, BONDING APPARATUS, PROCESS...

BONDING APPARATUS, BONDING METHOD, AND ARTICLE MANUFACTURING METHOD

BONDING APPARATUS, BONDING METHOD AND ARTICLE MANUFACTURING METHOD

BONDING APPARATUS AND BONDING METHOD

FORMING METHOD AND METHOD OF MANUFACTURING ARTICLE

LITHOGRAPHY APPARATUS, AND METHOD OF MANUFACTURING ARTICLE

LITHOGRAPHIC APPARATUS AND METHOD OF MANUFACTURING ARTICLE

EXPOSURE METHOD

ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE MANUFAC...

EXPOSURE APPARATUS

EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE FABRICATION METHOD

EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD

EXPOSURE METHOD

Illumination optical system, exposure apparatus and device fabricat...

Illumination optical system and exposure apparatus having the same

Exposure apparatus

Three-dimensional structure forming method

Exposure method and apparatus

Illumination optical system for use in projection exposure apparatus

Exposure amount control method in exposure apparatus