Kenichiro Nakamura

Person

Kurokawa-gun, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing system and temperature control method
- Patent number 12,142,501
- Issue date Nov 12, 2024
- Tokyo Electron Limited
- Kenichiro Yamada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing system and substrate processing method
- Patent number 11,917,729
- Issue date Feb 27, 2024
- Tokyo Electron Limited
- Hiroki Endo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Temperature control method
- Patent number 10,921,773
- Issue date Feb 16, 2021
- Tokyo Electron Limited
- Takari Yamamoto
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD
- Publication number 20240155737
- Publication date May 9, 2024
- TOKYO ELECTRON LIMITED
- Hiroki ENDO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPERATURE CONTROL METHOD
- Publication number 20240103482
- Publication date Mar 28, 2024
- TOKYO ELECTRON LIMITED
- Takari Yamamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND TEMPERATURE CONTROL METHOD
- Publication number 20220013387
- Publication date Jan 13, 2022
- TOKYO ELECTRON LIMITED
- Kenichiro YAMADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPERATURE CONTROL METHOD
- Publication number 20210132575
- Publication date May 6, 2021
- TOKYO ELECTRON LIMITED
- Takari Yamamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD
- Publication number 20210051769
- Publication date Feb 18, 2021
- TOKYO ELECTRON LIMITED
- Hiroki ENDO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND TEMPERATURE CONTROL METHOD
- Publication number 20170372928
- Publication date Dec 28, 2017
- TOKYO ELECTRON LIMITED
- Kenichiro YAMADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TEMPERATURE CONTROL METHOD
- Publication number 20160378092
- Publication date Dec 29, 2016
- TOKYO ELECTRON LIMITED
- Takari Yamamoto
- H01 - BASIC ELECTRIC ELEMENTS

Kenichiro Nakamura

Person

Patents Grantslast 30 patents

Substrate processing system and temperature control method

Substrate processing system and substrate processing method

Temperature control method

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD

TEMPERATURE CONTROL METHOD

SUBSTRATE PROCESSING SYSTEM AND TEMPERATURE CONTROL METHOD

TEMPERATURE CONTROL METHOD

SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING SYSTEM AND TEMPERATURE CONTROL METHOD

TEMPERATURE CONTROL METHOD