Kenichiro Shinoda

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Tochigi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Exposure apparatus
- Patent number 7,130,024
- Issue date Oct 31, 2006
- Canon Kabushiki Kaisha
- Kenichiro Shinoda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and method, and device fabricating method using...
- Patent number 7,092,071
- Issue date Aug 15, 2006
- Canon Kabushiki Kaisha
- Kenichiro Shinoda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and method, and device fabricating method using...
- Patent number 7,009,681
- Issue date Mar 7, 2006
- Canon Kabushiki Kaisha
- Kenichiro Shinoda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination optical system, exposure apparatus having the same, an...
- Patent number 6,894,764
- Issue date May 17, 2005
- Canon Kabushiki Kaisha
- Kenichiro Shinoda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination apparatus, exposure apparatus using the same and devic...
- Patent number 6,868,223
- Issue date Mar 15, 2005
- Canon Kabushiki Kaisha
- Kenichiro Shinoda
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
Exposure apparatus and method, and device fabricating method using...
- Publication number 20060050259
- Publication date Mar 9, 2006
- Kenichiro Shinoda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus
- Publication number 20050024619
- Publication date Feb 3, 2005
- Kenichiro Shinoda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Illumination optical system, exposure apparatus having the same, an...
- Publication number 20030197847
- Publication date Oct 23, 2003
- Kenichiro Shinoda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus and method, and device fabricating method using...
- Publication number 20030151730
- Publication date Aug 14, 2003
- Kenichiro Shinoda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Illumination apparatus, exposure apparatus using the same and devic...
- Publication number 20030021579
- Publication date Jan 30, 2003
- Kenichiro Shinoda
- G02 - OPTICS