Kenichiro YAMADA

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Miyagi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing system and temperature control method
- Patent number 12,142,501
- Issue date Nov 12, 2024
- Tokyo Electron Limited
- Kenichiro Yamada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Temperature measurement device, light emitting module and temperatu...
- Patent number 10,139,289
- Issue date Nov 27, 2018
- Tokyo Electron Limited
- Takari Yamamoto
- G01 - MEASURING TESTING
Information Patent Grant
Optical temperature sensor and method for manufacturing optical tem...
- Patent number 10,139,290
- Issue date Nov 27, 2018
- Tokyo Electron Limited
- Takari Yamamoto
- G01 - MEASURING TESTING
Information Patent Grant
Optical temperature sensor and method of controlling same
- Patent number 9,885,612
- Issue date Feb 6, 2018
- Tokyo Electron Limited
- Kenichiro Yamada
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND TEMPERATURE CONTROL METHOD
- Publication number 20220013387
- Publication date Jan 13, 2022
- TOKYO ELECTRON LIMITED
- Kenichiro YAMADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND TEMPERATURE CONTROL METHOD
- Publication number 20170372928
- Publication date Dec 28, 2017
- TOKYO ELECTRON LIMITED
- Kenichiro YAMADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TEMPERATURE MEASUREMENT DEVICE, LIGHT EMITTING MODULE AND TEMPERATU...
- Publication number 20170176264
- Publication date Jun 22, 2017
- TOKYO ELECTRON LIMITED
- Takari YAMAMOTO
- G01 - MEASURING TESTING
Information Patent Application
OPTICAL TEMPERATURE SENSOR AND METHOD FOR MANUFACTURING OPTICAL TEM...
- Publication number 20160363486
- Publication date Dec 15, 2016
- TOKYO ELECTRON LIMITED
- Takari YAMAMOTO
- G01 - MEASURING TESTING
Information Patent Application
OPTICAL TEMPERATURE SENSOR AND METHOD OF CONTROLLING SAME
- Publication number 20160033335
- Publication date Feb 4, 2016
- TOKYO ELECTRON LIMITED
- Kenichiro YAMADA
- G01 - MEASURING TESTING