Kenji Adachi

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus, control method, and computer-readab...
- Patent number 12,094,737
- Issue date Sep 17, 2024
- Tokyo Electron Limited
- Masayuki Kajiwara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process liquid supply apparatus operating method, process liquid su...
- Patent number 9,576,829
- Issue date Feb 21, 2017
- Tokyo Electron Limited
- Hiroshi Marumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process liquid supply apparatus operating method, process liquid su...
- Patent number 9,508,574
- Issue date Nov 29, 2016
- Tokyo Electron Limited
- Hiroshi Marumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device manufacturing method
- Patent number 9,245,764
- Issue date Jan 26, 2016
- Tokyo Electron Limited
- Eiichi Nishimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etching method
- Patent number 6,461,962
- Issue date Oct 8, 2002
- Tokyo Electron Limited
- Kenji Adachi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS, CONTROL METHOD, AND COMPUTER-READAB...
- Publication number 20210020464
- Publication date Jan 21, 2021
- TOKYO ELECTRON LIMITED
- Masayuki KAJIWARA
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
PROCESS LIQUID SUPPLY APPARATUS OPERATING METHOD, PROCESS LIQUID SU...
- Publication number 20170043287
- Publication date Feb 16, 2017
- TOKYO ELECTRON LIMITED
- Hiroshi MARUMOTO
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD
- Publication number 20150079790
- Publication date Mar 19, 2015
- TOKYO ELECTRON LIMITED
- Eiichi Nishimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESS LIQUID SUPPLY APPARATUS OPERATING METHOD, PROCESS LIQUID SU...
- Publication number 20140034584
- Publication date Feb 6, 2014
- TOKYO ELECTRON LIMITED
- Hiroshi MARUMOTO
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
Etching apparatus
- Publication number 20030006216
- Publication date Jan 9, 2003
- Kenji Adachi
- H01 - BASIC ELECTRIC ELEMENTS