Kenji Aiko

Person

Hitachinaka, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Far-infrared spectroscopy device
- Patent number 12,196,670
- Issue date Jan 14, 2025
- HITACHI HIGH-TECH CORPORATION
- Touya Ono
- G01 - MEASURING TESTING
Information Patent Grant
Far-infrared spectroscopy device and far-infrared spectroscopy method
- Patent number 11,977,026
- Issue date May 7, 2024
- HITACHI HIGH-TECH CORPORATION
- Mizuki Mohara
- G01 - MEASURING TESTING
Information Patent Grant
Far-infrared light source and far-infrared spectrometer
- Patent number 11,644,418
- Issue date May 9, 2023
- HITACHI HIGH-TECH CORPORATION
- Kei Shimura
- G01 - MEASURING TESTING
Information Patent Grant
Far-infrared spectroscopy device
- Patent number 11,320,309
- Issue date May 3, 2022
- HITACHI HIGH-TECH CORPORATION
- Kei Shimura
- G02 - OPTICS
Information Patent Grant
Far-infrared spectroscopy device
- Patent number 11,079,275
- Issue date Aug 3, 2021
- HITACHI HIGH-TECH CORPORATION
- Kei Shimura
- G01 - MEASURING TESTING
Information Patent Grant
Far-infrared spectroscopic device and far-infrared spectroscopic me...
- Patent number 11,016,023
- Issue date May 25, 2021
- Hitachi High-Technologies Corporation
- Mizuki Mohara
- G01 - MEASURING TESTING
Information Patent Grant
Far-infrared spectroscopy device
- Patent number 10,948,347
- Issue date Mar 16, 2021
- HITACHI HIGH-TECH CORPORATION
- Kei Shimura
- G01 - MEASURING TESTING
Information Patent Grant
Terahertz wave generating device and spectroscopic device using same
- Patent number 10,113,959
- Issue date Oct 30, 2018
- Hitachi High-Technologies Corporation
- Kenji Aiko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device for detecting foreign matter and method for detecting foreig...
- Patent number 9,164,042
- Issue date Oct 20, 2015
- Hitachi High-Technologies Corporation
- Kenji Aiko
- G01 - MEASURING TESTING
Information Patent Grant
Defect inspection system
- Patent number 8,804,109
- Issue date Aug 12, 2014
- Hitachi High-Technologies Corporation
- Kenji Aiko
- G01 - MEASURING TESTING
Information Patent Grant
Inspection apparatus, substrate mounting device and inspection method
- Patent number 8,723,536
- Issue date May 13, 2014
- Hitachi High-Technologies Corporation
- Yusuke Miyazaki
- G01 - MEASURING TESTING
Information Patent Grant
Wafer surface observing method and apparatus
- Patent number 8,577,119
- Issue date Nov 5, 2013
- Hitachi High-Technologies Corporation
- Hiroshi Higashi
- G01 - MEASURING TESTING
Information Patent Grant
Defect inspection system
- Patent number 8,319,960
- Issue date Nov 27, 2012
- Hitachi High-Technologies Corporation
- Kenji Aiko
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Defect inspection method and defect inspection apparatus
- Patent number 8,228,496
- Issue date Jul 24, 2012
- Hitachi High-Technologies Corporation
- Shuichi Chikamatsu
- G01 - MEASURING TESTING
Information Patent Grant
Defect inspecting method and apparatus
- Patent number 8,134,701
- Issue date Mar 13, 2012
- Hitachi High-Technologies Corporation
- Shuichi Chikamatsu
- G01 - MEASURING TESTING
Information Patent Grant
Defect inspection apparatus and defect inspection method
- Patent number 7,953,567
- Issue date May 31, 2011
- Hitachi High-Technologies Corporation
- Kei Shimura
- G01 - MEASURING TESTING
Information Patent Grant
Defect inspection method and defect inspection apparatus
- Patent number 7,847,927
- Issue date Dec 7, 2010
- Hitachi High-Technologies Corporation
- Shuichi Chikamatsu
- G01 - MEASURING TESTING
Information Patent Grant
Defect inspecting apparatus
- Patent number 7,733,475
- Issue date Jun 8, 2010
- Hitachi High-Technologies Corporation
- Shuichi Chikamatsu
- G01 - MEASURING TESTING
Information Patent Grant
Defect inspection system
- Patent number 7,733,474
- Issue date Jun 8, 2010
- Hitachi High-Technologies Corporation
- Kenji Aiko
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Defect inspection apparatus and defect inspection method
- Patent number 7,672,799
- Issue date Mar 2, 2010
- Hitachi High-Technologies Corporation
- Kei Shimura
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Defect inspecting apparatus
- Patent number 7,535,561
- Issue date May 19, 2009
- Hitachi High-Technologies Corporation
- Shuichi Chikamatsu
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Far-Infrared Spectroscopy Device and Sample Adapter
- Publication number 20240288365
- Publication date Aug 29, 2024
- Hitachi High-Tech Corporation
- Mizuki MOHARA
- G01 - MEASURING TESTING
Information Patent Application
Far-Infrared Spectroscopy Device
- Publication number 20230236123
- Publication date Jul 27, 2023
- Hitachi High-Tech Corporation
- Touya ONO
- G01 - MEASURING TESTING
Information Patent Application
Far-Infrared Spectroscopy Device and Far-Infrared Spectroscopy Method
- Publication number 20220412885
- Publication date Dec 29, 2022
- Hitachi High-Tech Corporation
- Mizuki MOHARA
- G01 - MEASURING TESTING
Information Patent Application
Far-Infrared Light Source and Far-Infrared Spectrometer
- Publication number 20210381965
- Publication date Dec 9, 2021
- HITACHI HIGH-TECH CORPORATION
- Kei SHIMURA
- G01 - MEASURING TESTING
Information Patent Application
FAR-INFRARED SPECTROSCOPY DEVICE
- Publication number 20210310865
- Publication date Oct 7, 2021
- HITACHI HIGH-TECH CORPORATION
- Kei SHIMURA
- G01 - MEASURING TESTING
Information Patent Application
Far-Infrared Spectroscopic Device and Far-Infrared Spectroscopic Me...
- Publication number 20210131957
- Publication date May 6, 2021
- Hitachi High-Technologies Corporation
- Mizuki MOHARA
- G01 - MEASURING TESTING
Information Patent Application
Far-Infrared Light Source and Far-Infrared Spectrometer
- Publication number 20200371023
- Publication date Nov 26, 2020
- Hitachi High-Tech Corporation
- Kei SHIMURA
- G01 - MEASURING TESTING
Information Patent Application
Far-Infrared Spectroscopy Device
- Publication number 20200088577
- Publication date Mar 19, 2020
- Hitachi High-Technologies Corporation
- Kei SHIMURA
- G02 - OPTICS
Information Patent Application
Far-Infrared Spectroscopy Device
- Publication number 20180209848
- Publication date Jul 26, 2018
- Hitachi High-Technologies Corporation
- Kei SHIMURA
- G02 - OPTICS
Information Patent Application
Terahertz Wave Generating Device and Spectroscopic Device Using Same
- Publication number 20180031469
- Publication date Feb 1, 2018
- Hitachi High-Technologies Corporation
- Kenji AIKO
- G02 - OPTICS
Information Patent Application
DEVICE FOR DETECTING FOREIGN MATTER AND METHOD FOR DETECTING FOREIG...
- Publication number 20130320216
- Publication date Dec 5, 2013
- Hitachi High-Technologies Corporation
- Kenji Aiko
- G01 - MEASURING TESTING
Information Patent Application
DEFECT INSPECTION SYSTEM
- Publication number 20130182100
- Publication date Jul 18, 2013
- Hitachi High-Technologies Corporation
- Kenji AIKO
- G01 - MEASURING TESTING
Information Patent Application
SUBSTRATE HOLDING DEVICE AND METHOD, AND INSPECTION APPARATUS AND M...
- Publication number 20130154675
- Publication date Jun 20, 2013
- Hitachi High-Technologies Corporation
- Yusuke Miyazaki
- G01 - MEASURING TESTING
Information Patent Application
INSPECTION DEVICE AND INSPECTION METHOD
- Publication number 20120313650
- Publication date Dec 13, 2012
- Hitachi High-Technologies Corporation
- Hiroshi Kawaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INSPECTION DEVICE AND METHOD
- Publication number 20120144938
- Publication date Jun 14, 2012
- Katsuyasu Inagaki
- G01 - MEASURING TESTING
Information Patent Application
DEFECT INSPECTION METHOD, AND DEFECT INSPECTION DEVICE
- Publication number 20110141463
- Publication date Jun 16, 2011
- Shuichi Chikamatsu
- G01 - MEASURING TESTING
Information Patent Application
DEFECT INSPECTION SYSTEM
- Publication number 20100271473
- Publication date Oct 28, 2010
- Hitachi High-Technologies Corporation
- Kenji AIKO
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Application
Defect Inspection Method and Defect Inspection Apparatus
- Publication number 20100271627
- Publication date Oct 28, 2010
- Hitachi High-Technologies Corporation
- Shuichi Chikamatsu
- G01 - MEASURING TESTING
Information Patent Application
DEFECT INSPECTING APPARATUS
- Publication number 20100214561
- Publication date Aug 26, 2010
- Hitachi High-Technologies Corporation
- Shuichi Chikamatsu
- G01 - MEASURING TESTING
Information Patent Application
Defect Inspection Apparatus and Defect Inspection Method
- Publication number 20100106443
- Publication date Apr 29, 2010
- Hitachi High-Technologies Corporation
- Kei SHIMURA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DEFECT INSPECTING APPARATUS
- Publication number 20090207405
- Publication date Aug 20, 2009
- Hitachi High-Technologies Corporation
- Shuichi Chikamatsu
- G01 - MEASURING TESTING
Information Patent Application
Defect inspection system
- Publication number 20080291436
- Publication date Nov 27, 2008
- Kenji Aiko
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Application
Defect Inspection Method and Defect Inspection Apparatus
- Publication number 20080204736
- Publication date Aug 28, 2008
- Hitachi High-Technologies Corporation
- Shuichi Chikamatsu
- G01 - MEASURING TESTING
Information Patent Application
Defect Inspection Apparatus and Defect Inspection Method
- Publication number 20080059094
- Publication date Mar 6, 2008
- Hitachi High-Technologies Corporation
- Kei SHIMURA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Wafer surface observing method and apparatus
- Publication number 20070269100
- Publication date Nov 22, 2007
- Hiroshi Higashi
- G01 - MEASURING TESTING
Information Patent Application
Defect inspecting apparatus
- Publication number 20070216896
- Publication date Sep 20, 2007
- Hitachi High-Technologies Corporation
- Shuichi Chikamatsu
- G01 - MEASURING TESTING

Person

Patents Grantslast 30 patents

Far-infrared spectroscopy device

Far-infrared spectroscopy device and far-infrared spectroscopy method

Far-infrared light source and far-infrared spectrometer

Far-infrared spectroscopy device

Far-infrared spectroscopy device

Far-infrared spectroscopic device and far-infrared spectroscopic me...

Far-infrared spectroscopy device

Terahertz wave generating device and spectroscopic device using same

Device for detecting foreign matter and method for detecting foreig...

Defect inspection system

Inspection apparatus, substrate mounting device and inspection method

Wafer surface observing method and apparatus

Defect inspection system

Defect inspection method and defect inspection apparatus

Defect inspecting method and apparatus

Defect inspection apparatus and defect inspection method

Defect inspection method and defect inspection apparatus

Defect inspecting apparatus

Defect inspection system

Defect inspection apparatus and defect inspection method

Defect inspecting apparatus

Patents Applicationslast 30 patents

Far-Infrared Spectroscopy Device and Sample Adapter

Far-Infrared Spectroscopy Device

Far-Infrared Spectroscopy Device and Far-Infrared Spectroscopy Method

Far-Infrared Light Source and Far-Infrared Spectrometer

FAR-INFRARED SPECTROSCOPY DEVICE

Far-Infrared Spectroscopic Device and Far-Infrared Spectroscopic Me...

Far-Infrared Light Source and Far-Infrared Spectrometer

Far-Infrared Spectroscopy Device

Far-Infrared Spectroscopy Device

Terahertz Wave Generating Device and Spectroscopic Device Using Same

DEVICE FOR DETECTING FOREIGN MATTER AND METHOD FOR DETECTING FOREIG...

DEFECT INSPECTION SYSTEM

SUBSTRATE HOLDING DEVICE AND METHOD, AND INSPECTION APPARATUS AND M...

INSPECTION DEVICE AND INSPECTION METHOD

INSPECTION DEVICE AND METHOD

DEFECT INSPECTION METHOD, AND DEFECT INSPECTION DEVICE

DEFECT INSPECTION SYSTEM

Defect Inspection Method and Defect Inspection Apparatus

DEFECT INSPECTING APPARATUS

Defect Inspection Apparatus and Defect Inspection Method

DEFECT INSPECTING APPARATUS

Defect inspection system

Defect Inspection Method and Defect Inspection Apparatus

Defect Inspection Apparatus and Defect Inspection Method

Wafer surface observing method and apparatus

Defect inspecting apparatus