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Kenji Akiyama
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Nishishirakawa-gun, JP
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Patents Grants
last 30 patents
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Patent Grant
Susceptor, vapor phase growth apparatus, epitaxial wafer manufactur...
Patent number
7,270,708
Issue date
Sep 18, 2007
Shin-Etsu Handotai Co., Ltd.
Tomosuke Yoshida
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
Susceptor gaseous phase growing device, device and method for manuf...
Publication number
20040255843
Publication date
Dec 23, 2004
Tomosuke Yoshida
C30 - CRYSTAL GROWTH