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Kenji Amano
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Nakakoma-gun, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Vacuum processing apparatus for semiconductor process
Patent number
6,565,662
Issue date
May 20, 2003
Tokyo Electron Limited
Kenji Amano
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Inductive coupling plasma processing apparatus
Patent number
6,387,208
Issue date
May 14, 2002
Tokyo Electron Limited
Tsutomu Satoyoshi
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Inductively-coupled-plasma-processing apparatus
Patent number
6,331,754
Issue date
Dec 18, 2001
Tokyo Electron Limited
Tsutomu Satoyoshi
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Inductive coupling plasma processing apparatus
Publication number
20020002947
Publication date
Jan 10, 2002
Tsutomu Satoyoshi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Vacuum processing apparatus for semiconductor process
Publication number
20010006094
Publication date
Jul 5, 2001
Kenji Amano
H01 - BASIC ELECTRIC ELEMENTS