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Kenji Atarashiya
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Hiroshima, JP
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last 30 patents
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Patent Grant
DC or HF ion source
Patent number
5,369,337
Issue date
Nov 29, 1994
Mitsubishi Jukogyo Kabushiki Kaisha
Kenichi Yanagi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Sputtering apparatus and an ion source
Patent number
5,288,386
Issue date
Feb 22, 1994
Mitsubishi Jukogyo Kabushiki Kaisha
Kenichi Yanagi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Vacuum vapor deposition apparatus
Patent number
5,169,451
Issue date
Dec 8, 1992
Mitsubishi Jukogyo Kabushiki Kaisha
Kenichi Yanagi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...