Kenji Atarashiya

Person

  • Hiroshima, JP

Patents Grantslast 30 patents

  • Information Patent Grant

    DC or HF ion source

    • Patent number 5,369,337
    • Issue date Nov 29, 1994
    • Mitsubishi Jukogyo Kabushiki Kaisha
    • Kenichi Yanagi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Sputtering apparatus and an ion source

    • Patent number 5,288,386
    • Issue date Feb 22, 1994
    • Mitsubishi Jukogyo Kabushiki Kaisha
    • Kenichi Yanagi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Vacuum vapor deposition apparatus

    • Patent number 5,169,451
    • Issue date Dec 8, 1992
    • Mitsubishi Jukogyo Kabushiki Kaisha
    • Kenichi Yanagi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...