Kenji Chiba

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Pattern forming method and manufacturing method of semiconductor de...
- Patent number 7,638,267
- Issue date Dec 29, 2009
- Kabushiki Kaisha Toshiba
- Kenji Chiba
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pattern forming method and method for manufacturing a semiconductor...
- Patent number 7,527,918
- Issue date May 5, 2009
- Kabushiki Kaisha Toshiba
- Takehiro Kondoh
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for evaluating a local flare, correction method for a mask p...
- Patent number 7,327,436
- Issue date Feb 5, 2008
- Kabushiki Kaisha Toshiba
- Kazuya Fukuhara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Photosensitive composition having uniform concentration distributio...
- Patent number 6,703,181
- Issue date Mar 9, 2004
- Kabushiki Kaisha Toshiba
- Takao Hayashi
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Grant
Resist composition for forming a pattern and method of forming a pa...
- Patent number 5,744,281
- Issue date Apr 28, 1998
- Kabushiki Kaisha Toshiba
- Hirokazu Niki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Resist composition for forming a pattern comprising a pyridinium co...
- Patent number 5,658,706
- Issue date Aug 19, 1997
- Kabushiki Kaisha Toshiba
- Hirokazu Niki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Pattern forming method and manufacturing method of semiconductor de...
- Publication number 20070105054
- Publication date May 10, 2007
- Kenji Chiba
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method for manufacturing semiconductor device
- Publication number 20060008746
- Publication date Jan 12, 2006
- Yasunobu Onishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method for evaluating a local flare, correction method for a mask p...
- Publication number 20050275820
- Publication date Dec 15, 2005
- Kazuya Fukuhara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Pattern forming method and method for manufacturing a semiconductor...
- Publication number 20050130068
- Publication date Jun 16, 2005
- Takehiro Kondoh
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Kenji Chiba

Person

Patents Grantslast 30 patents

Pattern forming method and manufacturing method of semiconductor de...

Pattern forming method and method for manufacturing a semiconductor...

Method for evaluating a local flare, correction method for a mask p...

Photosensitive composition having uniform concentration distributio...

Resist composition for forming a pattern and method of forming a pa...

Resist composition for forming a pattern comprising a pyridinium co...

Patents Applicationslast 30 patents

Pattern forming method and manufacturing method of semiconductor de...

Method for manufacturing semiconductor device

Method for evaluating a local flare, correction method for a mask p...

Pattern forming method and method for manufacturing a semiconductor...