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Kenji Homma
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Sagamihara, JP
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last 30 patents
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Patent Grant
Processing device and method of maintaining the device
Patent number
7,367,350
Issue date
May 6, 2008
Tokyo Electron Limited
Daisuke Toriya
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Single-substrate-heat-processing apparatus for semiconductor process
Patent number
6,537,422
Issue date
Mar 25, 2003
Tokyo Electron Limited
Takeshi Sakuma
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Processing furnace for oxidizing objects
Patent number
5,777,300
Issue date
Jul 7, 1998
Tokyo Electron Kabushiki Kaisha
Kenji Homma
C30 - CRYSTAL GROWTH
Patents Applications
last 30 patents
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Patent Application
Processing device and method of maintaining the device
Publication number
20050115501
Publication date
Jun 2, 2005
Daisuke Toriya
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Single-substrate-heat-processing apparatus for semiconductor process
Publication number
20010035131
Publication date
Nov 1, 2001
Takeshi Sakuma
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...