Kenji IIZUKA

Follow

Person

Koshi-Shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 9,818,654
- Issue date Nov 14, 2017
- Tokyo Electron Limited
- Masato Hayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
DEVELOPING APPARATUS, SUBSTRATE TREATMENT SYSTEM, AND DEVELOPING ME...
- Publication number 20240402609
- Publication date Dec 5, 2024
- TOKYO ELECTRON LIMITED
- Kenji IIZUKA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20160358829
- Publication date Dec 8, 2016
- TOKYO ELECTRON LIMITED
- Masato HAYASHI
- B08 - CLEANING