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Kenji Imamoto

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Patents Grantslast 30 patents

  • Information Patent Grant

    Dry etching method
    • Patent number 7,989,330
    • Issue date Aug 2, 2011
    • Hitachi High-Technologies Corporation
    • Takeshi Shima
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    DRY ETCHING METHOD
    • Publication number 20100285669
    • Publication date Nov 11, 2010
    • Takeshi SHIMA
    • H01 - BASIC ELECTRIC ELEMENTS