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Patents Grants
last 30 patents
Information
Patent Grant
Heating apparatus which has electrostatic adsorption function, and...
Patent number
6,953,918
Issue date
Oct 11, 2005
Shin-Etsu Chemical Co., Ltd.
Shoji Kano
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Ceramic heating jig
Patent number
6,384,383
Issue date
May 7, 2002
Shin-Etsu Chemical Co., Ltd.
Shoji Kano
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multiple-layered ceramic heater
Patent number
6,242,719
Issue date
Jun 5, 2001
Shin-Etsu Handotai Co., Ltd.
Shoji Kano
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Heating apparatus which has electrostatic adsorption function, and...
Publication number
20040108314
Publication date
Jun 10, 2004
Shin-Etsu Chemical Co., Ltd.
Shoji Kano
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Ceramic heating jig
Publication number
20010003334
Publication date
Jun 14, 2001
Shin-Etsu Chemical Co., Ltd.
Shoji Kano
H01 - BASIC ELECTRIC ELEMENTS