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Kenji Ito
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Machida, JP
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last 30 patents
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Patent Grant
Chemical vapor reaction process by virtue of uniform irradiation
Patent number
4,803,095
Issue date
Feb 7, 1989
Semiconductor Energy Laboratory Co., Ltd.
Shigenori Hayashi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Chemical vapor reaction apparatus
Patent number
4,768,464
Issue date
Sep 6, 1988
Semiconductor Energy Laboratory Co., Ltd.
Shigenori Hayashi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...