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Kenji Iwade
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Hiratsuka, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Manufacturing method of semiconductor device
Patent number
10,121,677
Issue date
Nov 6, 2018
TOSHIBA MEMORY CORPORATION
Yukiteru Matsui
B24 - GRINDING POLISHING
Information
Patent Grant
Manufacturing method of semiconductor device
Patent number
9,558,961
Issue date
Jan 31, 2017
Kabushiki Kaisha Toshiba
Akifumi Gawase
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for manufacturing semiconductor device
Patent number
8,748,289
Issue date
Jun 10, 2014
Ebara Corporation
Masayuki Nakanishi
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing apparatus and polishing method
Patent number
8,641,480
Issue date
Feb 4, 2014
Ebara Corporation
Masayuki Nakanishi
B24 - GRINDING POLISHING
Information
Patent Grant
Chemical mechanical polishing aqueous dispersion and chemical mecha...
Patent number
8,492,276
Issue date
Jul 23, 2013
JSR Corporation
Taichi Abe
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Grant
Method for manufacturing semiconductor device
Patent number
8,445,360
Issue date
May 21, 2013
Ebara Corporation
Masayuki Nakanishi
B24 - GRINDING POLISHING
Information
Patent Grant
Substrate holding mechanism, substrate polishing apparatus and subs...
Patent number
8,292,694
Issue date
Oct 23, 2012
Ebara Corporation
Tetsuji Togawa
B24 - GRINDING POLISHING
Information
Patent Grant
Substrate holding mechanism, substrate polishing apparatus and subs...
Patent number
7,883,394
Issue date
Feb 8, 2011
Ebara Corporation
Tetsuji Togawa
B24 - GRINDING POLISHING
Information
Patent Grant
Substrate holding mechanism, substrate polishing apparatus and subs...
Patent number
7,419,420
Issue date
Sep 2, 2008
Ebara Corporation
Tetsuji Togawa
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
Information
Patent Application
TEMPLATE CLEANING METHOD, TEMPLATE CLEANING APPARATUS, AND CLEANING...
Publication number
20180264524
Publication date
Sep 20, 2018
Toshiba Memory Corporation
Yumi TANAKA
B08 - CLEANING
Information
Patent Application
MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE AND SLURRY FOR CHEMICA...
Publication number
20170133238
Publication date
May 11, 2017
Kabushiki Kaisha Toshiba
Takahiko KAWASAKI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
Publication number
20160358787
Publication date
Dec 8, 2016
Kabushiki Kaisha Toshiba
Akifumi Gawase
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
Publication number
20160322231
Publication date
Nov 3, 2016
Kabushiki Kaisha Toshiba
Yukiteru Matsui
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
RETAINER RING, POLISHING APPARATUS, AND MANUFACTURING METHOD OF SEM...
Publication number
20160229026
Publication date
Aug 11, 2016
Kabushiki Kaisha Toshiba
Takahiko KAWASAKI
B24 - GRINDING POLISHING
Information
Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
Publication number
20130237033
Publication date
Sep 12, 2013
EBARA CORPORATION
Masayuki NAKANISHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
POLISHING METHOD
Publication number
20110256811
Publication date
Oct 20, 2011
Masayuki NAKANISHI
B24 - GRINDING POLISHING
Information
Patent Application
POLISHING APPARATUS AND POLISHING METHOD
Publication number
20110217906
Publication date
Sep 8, 2011
Masayuki NAKANISHI
B24 - GRINDING POLISHING
Information
Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
Publication number
20110207294
Publication date
Aug 25, 2011
Masayuki NAKANISHI
B24 - GRINDING POLISHING
Information
Patent Application
CHEMICAL MECHANICAL POLISHING AQUEOUS DISPERSION AND CHEMICAL MECHA...
Publication number
20100075501
Publication date
Mar 25, 2010
JSR Corporation
Taichi ABE
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
SUBSTRATE HOLDING MECHANISM, SUBSTRATE POLISHING APPARATUS AND SUBS...
Publication number
20100062691
Publication date
Mar 11, 2010
Tetsuji TOGAWA
B24 - GRINDING POLISHING
Information
Patent Application
SUBSTRATE HOLDING MECHANISM, SUBSTRATE POLISHING APPARATUS AND SUBS...
Publication number
20080318503
Publication date
Dec 25, 2008
Tetsuji TOGAWA
B24 - GRINDING POLISHING
Information
Patent Application
Substrate holding mechanism, substrate polishing apparatus and subs...
Publication number
20060205323
Publication date
Sep 14, 2006
Tetsuji Togawa
B24 - GRINDING POLISHING