Kenji Kawakita

Person

Osaka, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Fine pattern forming material and pattern forming method
- Patent number 5,306,601
- Issue date Apr 26, 1994
- Matsushita Electric Industrial Co., Ltd.
- Kazuhiko Hashimoto
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method and apparatus for writing a pattern on a semiconductor sampl...
- Patent number 5,182,718
- Issue date Jan 26, 1993
- Matsushita Electric Industrial Co., Ltd.
- Kenji Harafuji
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Fine pattern forming method
- Patent number 5,169,494
- Issue date Dec 8, 1992
- Matsushita Electric Industrial Co., Ltd.
- Kazuhiko Hashimoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Process for producing fine patterns using cyclocarbosilane
- Patent number 5,093,224
- Issue date Mar 3, 1992
- Matsushita Electric Industrial Co., Ltd.
- Kazuhiko Hashimoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Fine pattern forming method
- Patent number 5,030,549
- Issue date Jul 9, 1991
- Matsushita Electric Industrial Co., Ltd.
- Kazuhiko Hashimoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Electron beam exposure evaluation method
- Patent number 4,998,020
- Issue date Mar 5, 1991
- Matsushita Electric Industrial Co., Ltd.
- Akio Misaka
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Fine pattern forming method
- Patent number 4,976,818
- Issue date Dec 11, 1990
- Matsushita Electric Industrial Co., Ltd.
- Kazuhiko Hashimoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of reducing proximity effect in electron beam resists
- Patent number 4,936,951
- Issue date Jun 26, 1990
- Matsushita Electric Industrial Co., Ltd.
- Kazuhiko Hashimoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of manufacturing a semiconductor integrated circuit device
- Patent number 4,814,287
- Issue date Mar 21, 1989
- Matsushita Electric Industrial Co. Ltd.
- Toyoki Takemoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing isolated semiconductor devices
- Patent number 4,685,198
- Issue date Aug 11, 1987
- Matsushita Electric Industrial Co., Ltd.
- Kenji Kawakita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming isolated island regions in a semiconductor substr...
- Patent number 4,615,746
- Issue date Oct 7, 1986
- Kenji Kawakita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for making semiconductor device utilizing molecular beam epi...
- Patent number 4,563,807
- Issue date Jan 14, 1986
- Matsushita Electric Industrial Co., Ltd.
- Hiroyuki Sakai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for manufacturing a semiconductor device
- Patent number 4,563,227
- Issue date Jan 7, 1986
- Matsushita Electric Industrial Co., Ltd.
- Hiroyuki Sakai
- H01 - BASIC ELECTRIC ELEMENTS

Kenji Kawakita

Person

Patents Grantslast 30 patents

Fine pattern forming material and pattern forming method

Method and apparatus for writing a pattern on a semiconductor sampl...

Fine pattern forming method

Process for producing fine patterns using cyclocarbosilane

Fine pattern forming method

Electron beam exposure evaluation method

Fine pattern forming method

Method of reducing proximity effect in electron beam resists

Method of manufacturing a semiconductor integrated circuit device

Method of manufacturing isolated semiconductor devices

Method of forming isolated island regions in a semiconductor substr...

Method for making semiconductor device utilizing molecular beam epi...

Method for manufacturing a semiconductor device