Kenji Kawano

Person

Mie, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Switching device
- Patent number 9,464,710
- Issue date Oct 11, 2016
- Alps Electric Co., Ltd.
- Hironori Takeda
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Operation device
- Patent number 9,202,649
- Issue date Dec 1, 2015
- Alps Electric Co., Ltd.
- Fumihito Nikami
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Pattern forming method and a semiconductor device manufacturing method
- Patent number 7,972,765
- Issue date Jul 5, 2011
- Kabushiki Kaisha Toshiba
- Kenji Kawano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Photomask unit, exposing method and method for manufacturing semico...
- Patent number 7,960,075
- Issue date Jun 14, 2011
- Kabushiki Kaisha Toshiba
- Satoshi Nagai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Processing method, manufacturing method of semiconductor device, an...
- Patent number 7,727,853
- Issue date Jun 1, 2010
- Kabushiki Kaisha Toshiba
- Tomoyuki Takeishi
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Apparatus for processing substrate and method of processing the same
- Patent number 7,662,546
- Issue date Feb 16, 2010
- Kabushiki Kaisha Toshiba
- Kenji Kawano
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Pattern forming method and a semiconductor device manufacturing method
- Patent number 7,563,561
- Issue date Jul 21, 2009
- Kabushiki Kaisha Toshiba
- Kenji Kawano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure method and method for manufacturing semiconductor device
- Patent number 7,517,621
- Issue date Apr 14, 2009
- Kabushiki Kaisha Toshiba
- Kazuya Fukuhara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for forming a pattern and substrate-processing apparatus
- Patent number 7,364,839
- Issue date Apr 29, 2008
- Kabushiki Kaisha Toshiba
- Kei Hayasaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for evaluating a local flare, correction method for a mask p...
- Patent number 7,327,436
- Issue date Feb 5, 2008
- Kabushiki Kaisha Toshiba
- Kazuya Fukuhara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of processing a substrate, heating apparatus, and method of...
- Patent number 7,294,586
- Issue date Nov 13, 2007
- Kabushiki Kaisha Toshiba
- Kenji Kawano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing method, manufacturing method of semiconductor device, an...
- Patent number 7,288,466
- Issue date Oct 30, 2007
- Kabushiki Kaisha Toshiba
- Tomoyuki Takeishi
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Rotary electric component including a rotatably supporting case and...
- Patent number 7,173,236
- Issue date Feb 6, 2007
- Alps Electric Co., Ltd.
- Kenji Kawano
- G01 - MEASURING TESTING
Information Patent Grant
Push switch
- Patent number 7,164,092
- Issue date Jan 16, 2007
- Alps Electric Co., Ltd.
- Kenji Kawano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for manufacturing a semiconductor device and apparatus for m...
- Patent number 7,018,932
- Issue date Mar 28, 2006
- Kabushiki Kaisha Toshiba
- Shinichi Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of processing a substrate, heating apparatus, and method of...
- Patent number 7,009,148
- Issue date Mar 7, 2006
- Kabushiki Kaisha Toshiba
- Kenji Kawano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for processing substrate and method of processing the same
- Patent number 7,005,238
- Issue date Feb 28, 2006
- Kabushiki Kaisha Toshiba
- Kenji Kawano
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Apparatus for processing substrate and method of processing the same
- Patent number 7,005,249
- Issue date Feb 28, 2006
- Kabushiki Kaisha Toshiba
- Kenji Kawano
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Apparatus for processing substrate and method of processing the same
- Patent number 6,881,058
- Issue date Apr 19, 2005
- Kabushiki Kaisha Toshiba
- Kenji Kawano
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Heating device, method for evaluating heating device and pattern fo...
- Patent number 6,831,258
- Issue date Dec 14, 2004
- Kabushiki Kaisha Toshiba
- Kei Hayasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Optical element, optical system using optical element, and optical...
- Patent number 6,650,483
- Issue date Nov 18, 2003
- Canon Kabushiki Kaisha
- Tsukasa Uehara
- G02 - OPTICS
Information Patent Grant
Heating device, method for evaluating heating device and pattern fo...
- Patent number 6,603,101
- Issue date Aug 5, 2003
- Kabushiki Kaisha Toshiba
- Kei Hayasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Image input apparatus having interchangeable image pickup device an...
- Patent number 6,445,410
- Issue date Sep 3, 2002
- Canon Kabushiki Kaisha
- Kenji Kawano
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Heating device, method for evaluating heating device and pattern fo...
- Patent number 6,441,351
- Issue date Aug 27, 2002
- Kabushiki Kaisha Toshiba
- Kei Hayasaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pattern size evaluation apparatus
- Patent number 6,423,977
- Issue date Jul 23, 2002
- Kabushiki Kaisha Toshiba
- Kei Hayasaki
- G01 - MEASURING TESTING
Information Patent Grant
Semiconductor integrated device and methods of detecting and correc...
- Patent number 6,377,083
- Issue date Apr 23, 2002
- Tsutomu Takabayashi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Control method for exposure apparatus and control method for semico...
- Patent number 6,376,139
- Issue date Apr 23, 2002
- Kabushiki Kaisha Toshiba
- Tadahito Fujisawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical element, holding structure for optical element, and image p...
- Patent number 6,362,921
- Issue date Mar 26, 2002
- Canon Kabushiki Kaisha
- Seiji Iida
- G02 - OPTICS
Information Patent Grant
Light-quantity controlling device and apparatus using the same
- Patent number 6,340,252
- Issue date Jan 22, 2002
- Canon Kabushiki Kaisha
- Kenji Kawano
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Optical element, jig for holding optical element, and apparatus inc...
- Patent number 6,337,773
- Issue date Jan 8, 2002
- Canon Kabushiki Kaisha
- Kenji Kawano
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
COMMUNICATION SYSTEM AND ROUTER
- Publication number 20160028705
- Publication date Jan 28, 2016
- FUJI XEROX CO., LTD
- Kenji KAWANO
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Application
OPERATION DEVICE
- Publication number 20150144467
- Publication date May 28, 2015
- Alps Electric Co., Ltd.
- Fumihito NIKAMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SWITCHING DEVICE
- Publication number 20150107971
- Publication date Apr 23, 2015
- Alps Electric Co., Ltd.
- Hironori TAKEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LITHOGRAPHY MASK AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20130309869
- Publication date Nov 21, 2013
- KABUSHIKI KAISHA TOSHIBA
- Kenji KAWANO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LITHOGRAPHY MASK AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20120009510
- Publication date Jan 12, 2012
- Kabushiki Kaisha Toshiba
- Kenji KAWANO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
INFORMATION PROCESSING APPARATUS, MANAGEMENT APPARATUS, COMMUNICATI...
- Publication number 20100077204
- Publication date Mar 25, 2010
- FUJI XEROX CO., LTD
- Kenji KAWANO
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Application
Pattern forming method and a semiconductor device manufacturing method
- Publication number 20090246710
- Publication date Oct 1, 2009
- Kabushiki Kaisha Toshiba
- Kenji Kawano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20090142706
- Publication date Jun 4, 2009
- Kazuyuki Masukawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Processing method, manufacturing method of semiconductor device, an...
- Publication number 20090039275
- Publication date Feb 12, 2009
- Kabushiki Kaisha Toshiba
- Tomoyuki Takeishi
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
PHOTOMASK UNIT, EXPOSING METHOD AND METHOD FOR MANUFACTURING SEMICO...
- Publication number 20080124633
- Publication date May 29, 2008
- Satoshi Nagai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure method and method for manufacturing semiconductor device
- Publication number 20080063988
- Publication date Mar 13, 2008
- Kazuya Fukuhara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method of processing a substrate, heating apparatus, and method of...
- Publication number 20080064226
- Publication date Mar 13, 2008
- Kabushiki Kaisha Toshiba
- Kenji Kawano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Processing method, manufacturing method of semiconductor device, an...
- Publication number 20080050677
- Publication date Feb 28, 2008
- Kabushiki Kaisha Toshiba
- Tomoyuki Takeishi
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Processing method, manufacturing method of semiconductor device, an...
- Publication number 20080035851
- Publication date Feb 14, 2008
- Kabushiki Kaisha Toshiba
- Tomoyuki Takeishi
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Pattern forming method and a semiconductor device manufacturing method
- Publication number 20060110687
- Publication date May 25, 2006
- Kenji Kawano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Apparatus for processing substrate and method of processing the same
- Publication number 20060102614
- Publication date May 18, 2006
- Kabushiki Kaisha Toshiba
- Kenji Kawano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Push switch
- Publication number 20050274593
- Publication date Dec 15, 2005
- Alps Electric Co., Ltd.
- Kenji Kawano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for evaluating a local flare, correction method for a mask p...
- Publication number 20050275820
- Publication date Dec 15, 2005
- Kazuya Fukuhara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Substrate treatment method, substrate treatment apparatus, and meth...
- Publication number 20050250056
- Publication date Nov 10, 2005
- Kenji Kawano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Rotary electric component and operation panel using the same
- Publication number 20050173624
- Publication date Aug 11, 2005
- Alps Electric Co., Ltd.
- Kenji Kawano
- G01 - MEASURING TESTING
Information Patent Application
Apparatus for processing substrate and method of processing the same
- Publication number 20050158670
- Publication date Jul 21, 2005
- Kabushiki Kaisha Toshiba at Reel 012413/Frame 0041
- Kenji Kawano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Apparatus for processing substrate and method of processing the same
- Publication number 20050118536
- Publication date Jun 2, 2005
- Kabushiki Kaisha Toshiba
- Kenji Kawano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method of processing a substrate, heating apparatus, and method of...
- Publication number 20050118535
- Publication date Jun 2, 2005
- Kabushiki Kaisha Toshiba
- Kenji Kawano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Processing method and semiconductor manufacturing method
- Publication number 20050069815
- Publication date Mar 31, 2005
- Tomoyuki Takeishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for forming a pattern and substrate-processing apparatus
- Publication number 20040131980
- Publication date Jul 8, 2004
- Kei Hayasaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method of processing a substrate, heating apparatus, and method of...
- Publication number 20040121617
- Publication date Jun 24, 2004
- Kenji Kawano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Heating device, method for evaluating heating device and pattern fo...
- Publication number 20040089651
- Publication date May 13, 2004
- KABUSHIKI KAISHA TOSHIBA
- Kei Hayasaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Processing method, manufacturing method of semiconductor device, an...
- Publication number 20040043310
- Publication date Mar 4, 2004
- Tomoyuki Takeishi
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Method for manufacturing a semiconductor device and apparatus for m...
- Publication number 20040033448
- Publication date Feb 19, 2004
- Shinichi Ito
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Heating device, method for evaluating heating device and pattern fo...
- Publication number 20020170907
- Publication date Nov 21, 2002
- KABUSHIKI KAISHA TOSHIBA
- Kei Hayasaki
- H01 - BASIC ELECTRIC ELEMENTS

Kenji Kawano

Person

Patents Grantslast 30 patents

Switching device

Operation device

Pattern forming method and a semiconductor device manufacturing method

Photomask unit, exposing method and method for manufacturing semico...

Processing method, manufacturing method of semiconductor device, an...

Apparatus for processing substrate and method of processing the same

Pattern forming method and a semiconductor device manufacturing method

Exposure method and method for manufacturing semiconductor device

Method for forming a pattern and substrate-processing apparatus

Method for evaluating a local flare, correction method for a mask p...

Method of processing a substrate, heating apparatus, and method of...

Processing method, manufacturing method of semiconductor device, an...

Rotary electric component including a rotatably supporting case and...

Push switch

Method for manufacturing a semiconductor device and apparatus for m...

Method of processing a substrate, heating apparatus, and method of...

Apparatus for processing substrate and method of processing the same

Apparatus for processing substrate and method of processing the same

Apparatus for processing substrate and method of processing the same

Heating device, method for evaluating heating device and pattern fo...

Optical element, optical system using optical element, and optical...

Heating device, method for evaluating heating device and pattern fo...

Image input apparatus having interchangeable image pickup device an...

Heating device, method for evaluating heating device and pattern fo...

Pattern size evaluation apparatus

Semiconductor integrated device and methods of detecting and correc...

Control method for exposure apparatus and control method for semico...

Optical element, holding structure for optical element, and image p...

Light-quantity controlling device and apparatus using the same

Optical element, jig for holding optical element, and apparatus inc...

Patents Applicationslast 30 patents

COMMUNICATION SYSTEM AND ROUTER

OPERATION DEVICE

SWITCHING DEVICE

LITHOGRAPHY MASK AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

LITHOGRAPHY MASK AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

INFORMATION PROCESSING APPARATUS, MANAGEMENT APPARATUS, COMMUNICATI...

Pattern forming method and a semiconductor device manufacturing method

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

Processing method, manufacturing method of semiconductor device, an...

PHOTOMASK UNIT, EXPOSING METHOD AND METHOD FOR MANUFACTURING SEMICO...

Exposure method and method for manufacturing semiconductor device

Method of processing a substrate, heating apparatus, and method of...

Processing method, manufacturing method of semiconductor device, an...

Processing method, manufacturing method of semiconductor device, an...

Pattern forming method and a semiconductor device manufacturing method

Apparatus for processing substrate and method of processing the same

Push switch

Method for evaluating a local flare, correction method for a mask p...

Substrate treatment method, substrate treatment apparatus, and meth...

Rotary electric component and operation panel using the same

Apparatus for processing substrate and method of processing the same

Apparatus for processing substrate and method of processing the same

Method of processing a substrate, heating apparatus, and method of...

Processing method and semiconductor manufacturing method

Method for forming a pattern and substrate-processing apparatus

Method of processing a substrate, heating apparatus, and method of...

Heating device, method for evaluating heating device and pattern fo...

Processing method, manufacturing method of semiconductor device, an...

Method for manufacturing a semiconductor device and apparatus for m...

Heating device, method for evaluating heating device and pattern fo...