Kenji Kiyota

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Koshi-city, JP

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Patents Grantslast 30 patents

Information Patent Grant
Liquid processing apparatus, liquid processing method, and recordin...
- Patent number 9,073,103
- Issue date Jul 7, 2015
- Tokyo Electron Limited
- Satoshi Morita
- B08 - CLEANING
Information Patent Grant
Flow passage switching apparatus, processing apparatus, flow passag...
- Patent number 8,840,752
- Issue date Sep 23, 2014
- Tokyo Electron Limited
- Nobuhiro Ogata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing system
- Patent number 7,503,710
- Issue date Mar 17, 2009
- Tokyo Electron Limited
- Kenji Kiyota
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Feeding apparatus and replenishing method of processing solution
- Patent number 6,119,709
- Issue date Sep 19, 2000
- Tokyo Electron Ltd
- Kenji Kiyota
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Connector
- Publication number 20140027656
- Publication date Jan 30, 2014
- TYCO ELECTRONICS JAPAN G.K.
- Shinji Yamada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Liquid Processing Apparatus, Liquid Processing Method, and Recordin...
- Publication number 20120227768
- Publication date Sep 13, 2012
- TOKYO ELECTRON LIMITED
- Satoshi MORITA
- B08 - CLEANING
Information Patent Application
Flow Passage Switching Apparatus, Processing Apparatus, Flow Passag...
- Publication number 20110308626
- Publication date Dec 22, 2011
- TOKYO ELECTRON LIMITED
- Nobuhiro Ogata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate carrier
- Publication number 20070017560
- Publication date Jan 25, 2007
- TOKYO ELECTRON LIMITED
- Kenji Kiyota
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing system
- Publication number 20060266290
- Publication date Nov 30, 2006
- TOKYO ELECTON LIMITED
- Kenji Kiyota
- H01 - BASIC ELECTRIC ELEMENTS