Kenji Komatsu

Follow

Person

Nirasaki-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,501,976
- Issue date Nov 15, 2022
- Tokyo Electron Limited
- Seiichi Watanabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus
- Patent number 8,142,609
- Issue date Mar 27, 2012
- Tokyo Electron Limited
- Syuichi Takahashi
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER

Patents Applicationslast 30 patents

Information Patent Application
ETCHING METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20230377851
- Publication date Nov 23, 2023
- TOKYO ELECTRON LIMITED
- Fumiya YOSHII
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20210265170
- Publication date Aug 26, 2021
- TOKYO ELECTRON LIMITED
- Seiichi WATANABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20080308230
- Publication date Dec 18, 2008
- TOKYO ELECTRON LIMITED
- Syuichi TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20080242086
- Publication date Oct 2, 2008
- TOKYO ELECTRON LIMITED
- Hiroki MATSUMARU
- H01 - BASIC ELECTRIC ELEMENTS