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Kenji MAEDA
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Hillsboro, OR, US
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last 30 patents
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Patent Grant
Manufacturing method of a semiconductor device and a plasma process...
Patent number
10,892,158
Issue date
Jan 12, 2021
HITACHI HIGH-TECH CORPORATION
Makoto Miura
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
MANUFACTURING METHOD OF A SEMICONDUCTOR DEVICE AND A PLASMA PROCESS...
Publication number
20200312658
Publication date
Oct 1, 2020
Hitachi High-Technologies Corporation
Makoto MIURA
H01 - BASIC ELECTRIC ELEMENTS