Kenji MASUZAWA

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Nirasaki City, JP

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Patents Grantslast 30 patents

Information Patent Grant
Electrostatic chuck apparatus
- Patent number 9,721,822
- Issue date Aug 1, 2017
- Tokyo Electron Limited
- Yasuharu Sasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck apparatus
- Patent number 8,981,263
- Issue date Mar 17, 2015
- Tokyo Electron Limited
- Yasuharu Sasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and method, and storage medium
- Patent number 8,440,050
- Issue date May 14, 2013
- Tokyo Electron Limited
- Manabu Iwata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and plasma etching method
- Patent number 8,303,834
- Issue date Nov 6, 2012
- Tokyo Electron Limited
- Masanobu Honda
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ELECTROSTATIC CHUCK APPARATUS
- Publication number 20150179492
- Publication date Jun 25, 2015
- TOKYO ELECTRON LIMITED
- Yasuharu Sasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK APPARATUS
- Publication number 20120281334
- Publication date Nov 8, 2012
- SUMITOMO OSAKA CEMENT CO., LTD.
- Yasuharu Sasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA ETCHING METHOD
- Publication number 20090242515
- Publication date Oct 1, 2009
- TOKYO ELECTRON LIMITED
- Masanobu Honda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRODE STRUCTURE AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20090242133
- Publication date Oct 1, 2009
- TOKYO ELECTRON LIMITED
- Hiroyuki Nakayama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND METHOD, AND STORAGE MEDIUM
- Publication number 20090206058
- Publication date Aug 20, 2009
- TOKYO ELECTRON LIMITED
- Manabu IWATA
- H01 - BASIC ELECTRIC ELEMENTS