Kenji Matsumoto

Person

Yamanashi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Processing system and processing method
- Patent number 11,302,521
- Issue date Apr 12, 2022
- Tokyo Electron Limited
- Kenji Matsumoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and substrate processing control method
- Patent number 10,923,333
- Issue date Feb 16, 2021
- Tokyo Electron Limited
- Kenji Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for etching copper layer
- Patent number 10,825,688
- Issue date Nov 3, 2020
- Tokyo Electron Limited
- Shigeru Tahara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cu wiring forming method and semiconductor device manufacturing method
- Patent number 10,163,699
- Issue date Dec 25, 2018
- Tokyo Electron Limited
- Hiroyuki Nagai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing Cu wiring
- Patent number 10,096,548
- Issue date Oct 9, 2018
- Tokyo Electron Limited
- Kenji Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cu wiring manufacturing method and Cu wiring manufacturing system
- Patent number 9,892,965
- Issue date Feb 13, 2018
- Tokyo Electron Limited
- Kenji Matsumoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor device manufacturing method and storage medium
- Patent number 9,735,046
- Issue date Aug 15, 2017
- Tokyo Electron Limited
- Peng Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of fabricating semiconductor device including a substrate ha...
- Patent number 9,390,972
- Issue date Jul 12, 2016
- Tokyo Electron Limited
- Kenji Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming copper wiring
- Patent number 9,362,166
- Issue date Jun 7, 2016
- Tokyo Electron Limited
- Tadahiro Ishizaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film forming method and processing system
- Patent number 9,266,146
- Issue date Feb 23, 2016
- Tokyo Electron Limited
- Kenji Matsumoto
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Method for manufacturing semiconductor device for forming metal ele...
- Patent number 9,245,847
- Issue date Jan 26, 2016
- Tokyo Electron Limited
- Kenji Matsumoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor device manufacturing method for suppresing wiring mat...
- Patent number 9,240,379
- Issue date Jan 19, 2016
- Tokyo Electron Limited
- Kenji Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Manganese-containing film forming method, processing system, electr...
- Patent number 9,153,481
- Issue date Oct 6, 2015
- Tokyo Electron Limited
- Kenji Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Manganese metal film forming method, processing system, electronic...
- Patent number 9,136,132
- Issue date Sep 15, 2015
- Tokyo Electron Limited
- Kenji Matsumoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method, pretreatment device, and processing system
- Patent number 8,865,590
- Issue date Oct 21, 2014
- Tokyo Electron Limited
- Kenji Matsumoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Manganese oxide film forming method, semiconductor device manufactu...
- Patent number 8,859,421
- Issue date Oct 14, 2014
- Tokyo Electron Limited
- Koji Neishi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming a film
- Patent number 8,709,541
- Issue date Apr 29, 2014
- Tokyo Electron Limited
- Kenji Matsumoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method and processing system
- Patent number 8,440,563
- Issue date May 14, 2013
- Tokyo Electron Limited
- Kenji Matsumoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Metal oxide film formation method and apparatus
- Patent number 8,354,337
- Issue date Jan 15, 2013
- Tokyo Electron Limited
- Kenji Matsumoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, semiconductor manufac...
- Patent number 8,349,725
- Issue date Jan 8, 2013
- Tokyo Electron Limited
- Hiroshi Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device manufacturing method
- Patent number 8,314,004
- Issue date Nov 20, 2012
- Tokyo Electron Limited
- Kenji Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device, semiconductor device,...
- Patent number 8,247,321
- Issue date Aug 21, 2012
- Tokyo Electron Limited
- Kenji Matsumoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method and film forming apparatus
- Patent number 8,242,015
- Issue date Aug 14, 2012
- Tokyo Electron Limited
- Kenji Matsumoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor device manufacturing method
- Patent number 8,124,492
- Issue date Feb 28, 2012
- Tokyo Electron Limited
- Kenji Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Manufacturing method of semiconductor device
- Patent number 8,119,510
- Issue date Feb 21, 2012
- Tokyo Electron Limited
- Hiroshi Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Shower head structure and treating device
- Patent number 8,070,910
- Issue date Dec 6, 2011
- Tokyo Electron Limited
- Kenji Matsumoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor device manufacturing method, semiconductor manufactur...
- Patent number 8,008,184
- Issue date Aug 30, 2011
- Tokyo Electron Limited
- Kenji Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for manufacturing semiconductor device and computer storage...
- Patent number 7,629,183
- Issue date Dec 8, 2009
- Tokyo Electron Limited
- Kenji Matsumoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Shower head structure for processing semiconductor
- Patent number 7,540,923
- Issue date Jun 2, 2009
- Tokyo Electron Limited
- Toshio Takagi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for forming thin film and apparatus for forming thin film
- Patent number 7,354,622
- Issue date Apr 8, 2008
- Tokyo Electron Limited
- Hiroshi Shinriki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING CONTROL METHOD
- Publication number 20200035466
- Publication date Jan 30, 2020
- TOKYO ELECTRON LIMITED
- Kenji MATSUMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND PLASMA SHEATH HEIGHT CONTROL METHOD
- Publication number 20200035465
- Publication date Jan 30, 2020
- TOKYO ELECTRON LIMITED
- Kenji MATSUMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING SYSTEM AND PROCESSING METHOD
- Publication number 20190326105
- Publication date Oct 24, 2019
- TOKYO ELECTRON LIMITED
- Kenji MATSUMOTO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR ETCHING COPPER LAYER
- Publication number 20190272997
- Publication date Sep 5, 2019
- TOKYO ELECTRON LIMITED
- Shigeru TAHARA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Cu WIRING FORMING METHOD AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD
- Publication number 20180047624
- Publication date Feb 15, 2018
- TOKYO ELECTRON LIMITED
- Hiroyuki Nagai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Cu WIRING MANUFACTURING METHOD AND Cu WIRING MANUFACTURING SYSTEM
- Publication number 20170213763
- Publication date Jul 27, 2017
- Kenji MATSUMOTO
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND STORAGE MEDIUM
- Publication number 20170062269
- Publication date Mar 2, 2017
- TOKYO ELECTRON LIMITED
- Peng CHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF CLEANING BOTTOM OF VIA HOLE AND METHOD OF MANUFACTURING S...
- Publication number 20170025308
- Publication date Jan 26, 2017
- TOKYO ELECTRON LIMITED
- Kenji MATSUMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR FORMING MANGANESE-CONTAINING FILM
- Publication number 20160326646
- Publication date Nov 10, 2016
- TOKYO ELECTRON LIMITED
- Kenji MATSUMOTO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING Cu WIRING
- Publication number 20160276218
- Publication date Sep 22, 2016
- TOKYO ELECTRON LIMITED
- Kenji MATSUMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of Fabricating Semiconductor Device Including A Substrate Ha...
- Publication number 20150270166
- Publication date Sep 24, 2015
- TOKYO ELECTRON LIMITED
- Kenji MATSUMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF FORMING COPPER WIRING
- Publication number 20150262872
- Publication date Sep 17, 2015
- TOKYO ELECTRON LIMITED
- Tadahiro ISHIZAKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20150126027
- Publication date May 7, 2015
- TOKYO ELECTRON LIMITED
- Kenji MATSUMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR FORMING MANGANESE-CONTAINING FILM
- Publication number 20150110975
- Publication date Apr 23, 2015
- TOKYO ELECTRON LIMITED
- Kenji MATSUMOTO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, SEMICONDUCTOR DEVICE...
- Publication number 20150021775
- Publication date Jan 22, 2015
- TOKYO ELECTRON LIMITED
- Kenji MATSUMOTO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR DEVICE, SEMICONDUCTOR DEVICE MANUFACTURING METHOD, AN...
- Publication number 20140374904
- Publication date Dec 25, 2014
- Kenji MATSUMOTO
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
MANGANESE OXIDE FILM FORMING METHOD
- Publication number 20140363971
- Publication date Dec 11, 2014
- TOKYO ELECTRON LIMITED
- Kenji Matsumoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD, STORAGE MEDIUM AND SEMIC...
- Publication number 20140361436
- Publication date Dec 11, 2014
- Kenji Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE AND METHOD FOR FORMING FILM
- Publication number 20140190409
- Publication date Jul 10, 2014
- TOKYO ELECTRON LIMITED
- Kenji MATSUMOTO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MANGANESE-CONTAINING FILM FORMING METHOD, PROCESSING SYSTEM, ELECTR...
- Publication number 20140183742
- Publication date Jul 3, 2014
- TOKYO ELECTRON LIMITED
- Kenji MATSUMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MANGANESE METAL FILM FORMING METHOD, PROCESSING SYSTEM, ELECTRONIC...
- Publication number 20140183743
- Publication date Jul 3, 2014
- TOKYO ELECTRON LIMITED
- Kenji MATSUMOTO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD, SEMICONDUCTOR DEVICE, SE...
- Publication number 20140103529
- Publication date Apr 17, 2014
- TOKYO ELECTRON LIMITED
- Kenji Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MANGANESE SILICATE FILM FORMING METHOD, PROCESSING SYSTEM, SEMICOND...
- Publication number 20140084466
- Publication date Mar 27, 2014
- TOKYO ELECTRON LIMITED
- Kenji MATSUMOTO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD AND PROCESSING SYSTEM
- Publication number 20130136859
- Publication date May 30, 2013
- TOKYO ELECTRON LIMITED
- Kenji Matsumoto
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
DEVICE AND METHOD FOR FORMING FILM
- Publication number 20120251721
- Publication date Oct 4, 2012
- TOKYO ELECTRON LIMITED
- Kenji Matsumoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING METAL OXIDE FILM, METHOD FOR FORMING MANGANESE O...
- Publication number 20120219724
- Publication date Aug 30, 2012
- Tohoku University
- Koji Neishi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD, PRETREATMENT DEVICE, AND PROCESSING SYSTEM
- Publication number 20120135612
- Publication date May 31, 2012
- NATIONAL UNIVERSITY CORPORATION TOHOKU UNIVERSITY
- Kenji Matsumoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD
- Publication number 20120122289
- Publication date May 17, 2012
- TOKYO ELECTRON LIMITED
- Kenji Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MANGANESE OXIDE FILM FORMING METHOD, SEMICONDUCTOR DEVICE MANUFACTU...
- Publication number 20120025380
- Publication date Feb 2, 2012
- TOHOKU UNIVERSITY
- Koji Neishi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SEMICONDUCTOR MANUFAC...
- Publication number 20110237066
- Publication date Sep 29, 2011
- TOKYO ELECTRON LIMITED
- Hiroshi Sato
- H01 - BASIC ELECTRIC ELEMENTS

Kenji Matsumoto

Person

Patents Grantslast 30 patents

Processing system and processing method

Substrate processing apparatus and substrate processing control method

Method for etching copper layer

Cu wiring forming method and semiconductor device manufacturing method

Method of manufacturing Cu wiring

Cu wiring manufacturing method and Cu wiring manufacturing system

Semiconductor device manufacturing method and storage medium

Method of fabricating semiconductor device including a substrate ha...

Method of forming copper wiring

Film forming method and processing system

Method for manufacturing semiconductor device for forming metal ele...

Semiconductor device manufacturing method for suppresing wiring mat...

Manganese-containing film forming method, processing system, electr...

Manganese metal film forming method, processing system, electronic...

Film forming method, pretreatment device, and processing system

Manganese oxide film forming method, semiconductor device manufactu...

Method for forming a film

Film forming method and processing system

Metal oxide film formation method and apparatus

Method of manufacturing semiconductor device, semiconductor manufac...

Semiconductor device manufacturing method

Method of manufacturing semiconductor device, semiconductor device,...

Film forming method and film forming apparatus

Semiconductor device manufacturing method

Manufacturing method of semiconductor device

Shower head structure and treating device

Semiconductor device manufacturing method, semiconductor manufactur...

Method for manufacturing semiconductor device and computer storage...

Shower head structure for processing semiconductor

Method for forming thin film and apparatus for forming thin film

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING CONTROL METHOD

SUBSTRATE PROCESSING APPARATUS AND PLASMA SHEATH HEIGHT CONTROL METHOD

PROCESSING SYSTEM AND PROCESSING METHOD

METHOD FOR ETCHING COPPER LAYER

Cu WIRING FORMING METHOD AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD

Cu WIRING MANUFACTURING METHOD AND Cu WIRING MANUFACTURING SYSTEM

SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND STORAGE MEDIUM

METHOD OF CLEANING BOTTOM OF VIA HOLE AND METHOD OF MANUFACTURING S...

METHOD FOR FORMING MANGANESE-CONTAINING FILM

METHOD OF MANUFACTURING Cu WIRING

Method of Fabricating Semiconductor Device Including A Substrate Ha...

METHOD OF FORMING COPPER WIRING

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

METHOD FOR FORMING MANGANESE-CONTAINING FILM

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, SEMICONDUCTOR DEVICE...

SEMICONDUCTOR DEVICE, SEMICONDUCTOR DEVICE MANUFACTURING METHOD, AN...

MANGANESE OXIDE FILM FORMING METHOD

SEMICONDUCTOR DEVICE MANUFACTURING METHOD, STORAGE MEDIUM AND SEMIC...

DEVICE AND METHOD FOR FORMING FILM

MANGANESE-CONTAINING FILM FORMING METHOD, PROCESSING SYSTEM, ELECTR...

MANGANESE METAL FILM FORMING METHOD, PROCESSING SYSTEM, ELECTRONIC...

SEMICONDUCTOR DEVICE MANUFACTURING METHOD, SEMICONDUCTOR DEVICE, SE...

MANGANESE SILICATE FILM FORMING METHOD, PROCESSING SYSTEM, SEMICOND...

FILM FORMING METHOD AND PROCESSING SYSTEM

DEVICE AND METHOD FOR FORMING FILM

METHOD FOR FORMING METAL OXIDE FILM, METHOD FOR FORMING MANGANESE O...

FILM FORMING METHOD, PRETREATMENT DEVICE, AND PROCESSING SYSTEM

SEMICONDUCTOR DEVICE MANUFACTURING METHOD

MANGANESE OXIDE FILM FORMING METHOD, SEMICONDUCTOR DEVICE MANUFACTU...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SEMICONDUCTOR MANUFAC...