Kenji MINAMI

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Yokohama-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 9,966,282
- Issue date May 8, 2018
- Shibaura Mechatronics Corporation
- Kunihiro Miyazaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20160093486
- Publication date Mar 31, 2016
- SHIBAURA MECHATRONICS CORPORATION
- Kunihiro MIYAZAKI
- B08 - CLEANING