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Kenji Momose
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Nirasaki, JP
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last 30 patents
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Patent Grant
Plasma treatment apparatus and method
Patent number
5,698,062
Issue date
Dec 16, 1997
Tokyo Electron Limited
Takao Sakamoto
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Plasma processing method
Patent number
5,246,529
Issue date
Sep 21, 1993
Tokyo Electron Limited
Yoshio Fukasawa
H01 - BASIC ELECTRIC ELEMENTS