Kenji Nakamura

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Mihama-ku, JP

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Patents Grantslast 30 patents

Information Patent Grant
Quartz component for plasma processing apparatus and restoring meth...
- Patent number 7,691,277
- Issue date Apr 6, 2010
- Kawasaki Microelectronics, Inc.
- Katsunori Suzuki
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Quartz component for plasma processing apparatus and restoring meth...
- Publication number 20080206452
- Publication date Aug 28, 2008
- KAWASAKI MICROELECTRONICS, INC.
- Katsunori Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Quartz component for plasma processing apparatus and restoring meth...
- Publication number 20040173319
- Publication date Sep 9, 2004
- KAWASAKI MICROELECTRONICS, INC.
- Katsunori Suzuki
- H01 - BASIC ELECTRIC ELEMENTS