Kenji Nakata

Person

Hikari, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 8,632,688
- Issue date Jan 21, 2014
- Hitachi High-Technologies Corporation
- Masaru Izawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum processing apparatus
- Patent number 8,033,770
- Issue date Oct 11, 2011
- Hitachi High-Technologies Corporation
- Takeshi Oono
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum processing apparatus and vacuum processing method
- Patent number 7,862,289
- Issue date Jan 4, 2011
- Hitachi High-Technologies Corporation
- Takeshi Oono
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum processing method
- Patent number 7,476,073
- Issue date Jan 13, 2009
- Hitachi High-Technologies Corporation
- Takeshi Oono
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum processing system
- Patent number 5,685,684
- Issue date Nov 11, 1997
- Hitachi, Ltd.
- Shigekazu Kato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma generating method and apparatus and plasma processing method...
- Patent number 5,580,420
- Issue date Dec 3, 1996
- Hitachi, Ltd.
- Katsuya Watanabe
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20130045547
- Publication date Feb 21, 2013
- Masaru IZAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Vacuum Processing Apparatus And Vacuum Processing Method
- Publication number 20110299962
- Publication date Dec 8, 2011
- Takeshi Oono
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Vacuum processing apparatus and vacuum processing method
- Publication number 20090010738
- Publication date Jan 8, 2009
- Takeshi Oono
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Vacuum processing apparatus and vacuum processing method
- Publication number 20090003978
- Publication date Jan 1, 2009
- Takeshi Oono
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Vacuum processing apparatus and vacuum processing method
- Publication number 20050220575
- Publication date Oct 6, 2005
- Takeshi Oono
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Remote diagnostic system for facilities and remote diagnostic method
- Publication number 20050108577
- Publication date May 19, 2005
- Kouji Nishihata
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Desktop conference method and desktop conference system for perform...
- Publication number 20030169291
- Publication date Sep 11, 2003
- Kenji Nakata
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Application
Remote diagnostic system for facilities and remote diagnostic method
- Publication number 20020013908
- Publication date Jan 31, 2002
- Kouji Nishihata
- G06 - COMPUTING CALCULATING COUNTING

Kenji Nakata

Person

Patents Grantslast 30 patents

Plasma processing apparatus and plasma processing method

Vacuum processing apparatus

Vacuum processing apparatus and vacuum processing method

Vacuum processing method

Vacuum processing system

Plasma generating method and apparatus and plasma processing method...

Patents Applicationslast 30 patents

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

Vacuum Processing Apparatus And Vacuum Processing Method

Vacuum processing apparatus and vacuum processing method

Vacuum processing apparatus and vacuum processing method

Vacuum processing apparatus and vacuum processing method

Remote diagnostic system for facilities and remote diagnostic method

Desktop conference method and desktop conference system for perform...

Remote diagnostic system for facilities and remote diagnostic method