Kenji Nebuka

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Nirasaki, JP

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Patents Grantslast 30 patents

Information Patent Grant
Treatment apparatus
- Patent number 5,753,891
- Issue date May 19, 1998
- Tokyo Electron Limited
- Teruo Iwata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Load-lock unit and wafer transfer system
- Patent number 5,435,683
- Issue date Jul 25, 1995
- Tokyo Electron Limited
- Tetsu Oosawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Load-lock unit and wafer transfer system
- Patent number 5,405,230
- Issue date Apr 11, 1995
- Tokyo Electron Limited
- Hiroo Ono
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Load-lock unit and wafer transfer system
- Patent number 5,340,261
- Issue date Aug 23, 1994
- Tokyo Electron Limited
- Tetsu Oosawa
- H01 - BASIC ELECTRIC ELEMENTS