Kenji Nishi

Follow

Person

Koshi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Liquid processing apparatus, liquid processing method and storage m...
- Patent number 9,305,767
- Issue date Apr 5, 2016
- Tokyo Electron Limited
- Kenji Nishi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20190355593
- Publication date Nov 21, 2019
- TOKYO ELECTRON LIMITED
- Yoshinori Ikeda
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM, AND SU...
- Publication number 20190341272
- Publication date Nov 7, 2019
- TOKYO ELECTRON LIMITED
- Yoshinori Ikeda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD AND STORAGE M...
- Publication number 20120234356
- Publication date Sep 20, 2012
- TOKYO ELECTRON LIMITED
- Kenji Nishi
- H01 - BASIC ELECTRIC ELEMENTS