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Kenji Noda
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Toyama, JP
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last 30 patents
Information
Patent Grant
Developing method and method for fabricating semiconductor device u...
Patent number
7,883,840
Issue date
Feb 8, 2011
Panasonic Corporation
Hidekazu Kitahara
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Focus measurement method and method of manufacturing a semiconducto...
Patent number
7,838,185
Issue date
Nov 23, 2010
Panasonic Corporation
Rimiko Ide
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Photomask and method for forming pattern
Patent number
7,582,394
Issue date
Sep 1, 2009
Panasonic Corporation
Kenji Noda
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure apparatus and exposure method
Patent number
7,426,016
Issue date
Sep 16, 2008
Matsushita Electric Industrial Co., Ltd.
Noritoshi Takada
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
FOCUS MEASUREMENT METHOD AND METHOD OF MANUFACTURING A SEMICONDUCTO...
Publication number
20090197189
Publication date
Aug 6, 2009
Rimiko IDE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Exposure apparatus and exposure method
Publication number
20080129978
Publication date
Jun 5, 2008
Noritoshi Takada
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Developing method and method for fabricating semiconductor device u...
Publication number
20070264007
Publication date
Nov 15, 2007
Hidekazu Kitahara
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Photomask and method for forming pattern
Publication number
20050074682
Publication date
Apr 7, 2005
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
Kenji Noda
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY