Kenji Noda

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Utsunomiya-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Vibration control apparatus, lithography apparatus, and method of m...
- Patent number 10,209,633
- Issue date Feb 19, 2019
- Canon Kabushiki Kaisha
- Ryo Nawata
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Measurement apparatus, lithography apparatus, and article manufactu...
- Patent number 9,651,876
- Issue date May 16, 2017
- Canon Kabushiki Kaisha
- Kenji Noda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
VIBRATION CONTROL APPARATUS, LITHOGRAPHY APPARATUS, AND METHOD OF M...
- Publication number 20170102626
- Publication date Apr 13, 2017
- Canon Kabushiki Kaisha
- Ryo Nawata
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
MEASUREMENT APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTU...
- Publication number 20150346611
- Publication date Dec 3, 2015
- Canon Kabushiki Kaisha
- Kenji Noda
- G01 - MEASURING TESTING