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Kenji Numajiri
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Tokyo, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Heating process apparatus
Patent number
8,150,243
Issue date
Apr 3, 2012
Canon Anelva Corporation
Akira Kumagai
G01 - MEASURING TESTING
Information
Patent Grant
Substrate heating apparatus and semiconductor fabrication method
Patent number
7,807,553
Issue date
Oct 5, 2010
Canon Anelva Corporation
Masami Shibagaki
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
HEATING PROCESS APPARATUS
Publication number
20100111512
Publication date
May 6, 2010
Canon ANELVA Corporation
Akira Kumagai
G01 - MEASURING TESTING
Information
Patent Application
SUBSTRATE HEATING APPARATUS AND SUBSTRATE HEATING METHOD
Publication number
20100006560
Publication date
Jan 14, 2010
Canon ANELVA Corporation
Akihiro EGAMI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE HEATING APPARATUS AND SEMICONDUCTOR FABRICATION METHOD
Publication number
20080213988
Publication date
Sep 4, 2008
Canon ANELVA Corporation
Masami Shibagaki
H01 - BASIC ELECTRIC ELEMENTS