Kenji Obara

Person

Kawasaki, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Charged particle beam system, method for determining range for auto...
- Patent number 11,195,694
- Issue date Dec 7, 2021
- HITACHI HIGH-TECH CORPORATION
- Kosuke Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged-particle radiation apparatus
- Patent number 9,685,301
- Issue date Jun 20, 2017
- Hitachi High-Technologies Corporation
- Takehiro Hirai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Defect analysis assistance device, program executed by defect analy...
- Patent number 9,582,875
- Issue date Feb 28, 2017
- Hitachi High-Technologies Corporation
- Takehiro Hirai
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Region-of-interest determination apparatus, observation tool or ins...
- Patent number 9,335,277
- Issue date May 10, 2016
- Hitachi High-Technologies Corporation
- Ryo Nakagaki
- G01 - MEASURING TESTING
Information Patent Grant
Charged particle beam device and method for analyzing defect therein
- Patent number 9,312,099
- Issue date Apr 12, 2016
- Hitachi High-Technologies Corporation
- Kenji Obara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus
- Patent number 9,287,082
- Issue date Mar 15, 2016
- Hitachi High-Technologies Corporation
- Kenichi Morita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus that performs image classification...
- Patent number 9,280,814
- Issue date Mar 8, 2016
- Hitachi High-Technologies Corporation
- Takehiro Hirai
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Charged particle beam apparatus
- Patent number 9,177,757
- Issue date Nov 3, 2015
- Hitachi High-Technologies Corporation
- Naoma Ban
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Surface observation apparatus and surface observation method
- Patent number 9,136,189
- Issue date Sep 15, 2015
- Hitachi High-Technologies Corporation
- Takehiro Hirai
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Observation method and observation device
- Patent number 8,878,925
- Issue date Nov 4, 2014
- Hitachi High-Technologies Corporation
- Naoma Ban
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device, defect observation device, and manage...
- Patent number 8,779,360
- Issue date Jul 15, 2014
- Hitachi High-Technologies Corporation
- Kozo Miyake
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for reviewing defects
- Patent number 8,731,275
- Issue date May 20, 2014
- Hitachi High-Technologies Corporation
- Minoru Harada
- G01 - MEASURING TESTING
Information Patent Grant
Defect observation method and defect observation apparatus
- Patent number 8,634,634
- Issue date Jan 21, 2014
- Hitachi High-Technologies Corporation
- Minoru Harada
- G01 - MEASURING TESTING
Information Patent Grant
Defect review system and method, and program
- Patent number 8,467,595
- Issue date Jun 18, 2013
- Hitachi High-Technologies Corporation
- Noritsugu Takahashi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Inspecting method, inspecting system, and method for manufacturing...
- Patent number 8,428,336
- Issue date Apr 23, 2013
- Hitachi, Ltd.
- Yoko Ikeda
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and apparatus for reviewing defects
- Patent number 8,355,559
- Issue date Jan 15, 2013
- Hitachi High-Technologies Corporation
- Minoru Harada
- G01 - MEASURING TESTING
Information Patent Grant
Inspection method for semiconductor wafer and apparatus for reviewi...
- Patent number 8,309,919
- Issue date Nov 13, 2012
- Hitachi High-Technologies Corporation
- Kenji Obara
- G01 - MEASURING TESTING
Information Patent Grant
Pattern defect analysis equipment, pattern defect analysis method a...
- Patent number 8,280,148
- Issue date Oct 2, 2012
- Hitachi High-Technologies Corporation
- Norio Satou
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Scanning electron microscope
- Patent number 8,188,428
- Issue date May 29, 2012
- Hitachi High-Technologies Corporation
- Kohei Yamaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Defect inspection tool and method of parameter tuning for defect in...
- Patent number 8,139,847
- Issue date Mar 20, 2012
- Hitachi High-Technologies Corporation
- Kohei Yamaguchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Pattern defect analysis equipment, pattern defect analysis method a...
- Patent number 8,121,393
- Issue date Feb 21, 2012
- Hitachi High-Technologies Corporation
- Norio Satou
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and its apparatus for reviewing defects
- Patent number 8,121,397
- Issue date Feb 21, 2012
- Hitachi High-Technologies Corporation
- Minoru Harada
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Defect review apparatus and method of reviewing defects
- Patent number 8,108,172
- Issue date Jan 31, 2012
- Hitachi High-Technologies Corporation
- Takehiro Hirai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Review method and review device
- Patent number 8,013,299
- Issue date Sep 6, 2011
- Hitachi High-Technologies Corporation
- Kenji Obara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for observing a specimen using a scanning electro...
- Patent number 7,932,493
- Issue date Apr 26, 2011
- Hitachi High-Technologies Corporation
- Minoru Harada
- G01 - MEASURING TESTING
Information Patent Grant
Defect review and classification system
- Patent number 7,925,367
- Issue date Apr 12, 2011
- Hitachi High-Technologies Corporation
- Takehiro Hirai
- G05 - CONTROLLING REGULATING
Information Patent Grant
Scanning microscope
- Patent number 7,881,558
- Issue date Feb 1, 2011
- Hitachi High-Technologies Corporation
- Kohei Yamaguchi
- G01 - MEASURING TESTING
Information Patent Grant
Defect review apparatus and method of reviewing defects
- Patent number 7,869,969
- Issue date Jan 11, 2011
- Hitachi High-Technologies Corporation
- Takehiro Hirai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Power supply circuit
- Patent number 7,834,651
- Issue date Nov 16, 2010
- Advantest Corporation
- Kenji Obara
- G01 - MEASURING TESTING
Information Patent Grant
Scanning electron microscope
- Patent number 7,732,765
- Issue date Jun 8, 2010
- Hitachi High-Technologies Corporation
- Kohei Yamaguchi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Charged Particle Beam System, Method for Determining Range for Auto...
- Publication number 20210166911
- Publication date Jun 3, 2021
- HITACHI HIGH-TECH CORPORATION
- Kosuke MATSUMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM DEVICE AND METHOD FOR ANALYZING DEFECT THEREIN
- Publication number 20150348750
- Publication date Dec 3, 2015
- Hitachi High-Technologies Corporation
- Kenji OBARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged-Particle Radiation Apparatus
- Publication number 20150279614
- Publication date Oct 1, 2015
- Hitachi High-Technologies Corporation
- Takehiro Hirai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS
- Publication number 20150228443
- Publication date Aug 13, 2015
- Hitachi High-Technologies Corporation
- Kenichi MORITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS
- Publication number 20150170875
- Publication date Jun 18, 2015
- Hitachi High-Technologies Corporation
- Naoma Ban
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEFECT ANALYSIS ASSISTANCE DEVICE, PROGRAM EXECUTED BY DEFECT ANALY...
- Publication number 20150139531
- Publication date May 21, 2015
- Hitachi High-Technologies Corporation
- Takehiro Hirai
- G01 - MEASURING TESTING
Information Patent Application
REGION-OF-INTEREST DETERMINATION APPARATUS, OBSERVATION TOOL OR INS...
- Publication number 20140198975
- Publication date Jul 17, 2014
- Hitachi High-Technologies Corporation
- Ryo Nakagaki
- G01 - MEASURING TESTING
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS THAT PERFORMS IMAGE CLASSIFICATION...
- Publication number 20140185918
- Publication date Jul 3, 2014
- Hitachi High-Technologies Corporation
- Takehiro Hirai
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
INSPECTION METHOD FOR SEMICONDUCTOR WAFER AND APPARATUS FOR REVIEWI...
- Publication number 20130228685
- Publication date Sep 5, 2013
- Hitachi High-Technologies Corporation
- Kenji Obara
- G01 - MEASURING TESTING
Information Patent Application
INSPECTION METHOD FOR SEMICONDUCTOR WAFER AND APPARATUS FOR REVIEWI...
- Publication number 20130112872
- Publication date May 9, 2013
- Hitachi High-Technologies Corporation
- Kenji Obara
- G01 - MEASURING TESTING
Information Patent Application
CHARGED PARTICLE BEAM DEVICE, DEFECT OBSERVATION DEVICE, AND MANAGE...
- Publication number 20130112893
- Publication date May 9, 2013
- Kozo Miyake
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR REVIEWING DEFECTS
- Publication number 20130114881
- Publication date May 9, 2013
- Minoru Harada
- G01 - MEASURING TESTING
Information Patent Application
OBSERVATION METHOD AND OBSERVATION DEVICE
- Publication number 20120300056
- Publication date Nov 29, 2012
- Hitachi High-Technologies Corporation
- Naoma Ban
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PATTERN DEFECT ANALYSIS EQUIPMENT, PATTERN DEFECT ANALYSIS METHOD A...
- Publication number 20120114221
- Publication date May 10, 2012
- Hitachi High-Technologies Corporation
- Norio Satou
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SURFACE OBSERVATION APPARATUS AND SURFACE OBSERVATION METHOD
- Publication number 20120044262
- Publication date Feb 23, 2012
- Takehiro Hirai
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DEFECT OBSERVATION METHOD AND DEFECT OBSERVATION APPARATUS
- Publication number 20110299760
- Publication date Dec 8, 2011
- Minoru Harada
- G01 - MEASURING TESTING
Information Patent Application
DEFECT OBSERVATION DEVICE AND DEFECT OBSERVATION METHOD
- Publication number 20110261190
- Publication date Oct 27, 2011
- Ryo Nakagaki
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DEFECT REVIEW SYSTEM AND METHOD, AND PROGRAM
- Publication number 20110129142
- Publication date Jun 2, 2011
- Hitachi High-Technologies Corporation
- Noritsugu Takahashi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Defect Review Apparatus and Method of Reviewing Defects
- Publication number 20110062328
- Publication date Mar 17, 2011
- Hitachi High-Technologies Corporation
- Takehiro Hirai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SCANNING ELECTRON MICROSCOPE
- Publication number 20100213371
- Publication date Aug 26, 2010
- Hitachi High-Technologies Corporation
- Kohei Yamaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AUTOMATIC DEFECT REVIEW AND CLASSIFICATION SYSTEM
- Publication number 20100021047
- Publication date Jan 28, 2010
- Hitachi High-Technologies Corporation
- Takehiro Hirai
- G05 - CONTROLLING REGULATING
Information Patent Application
METHOD AND APPARATUS FOR REVIEWING DEFECTS
- Publication number 20090268959
- Publication date Oct 29, 2009
- Minoru Harada
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND ITS APPARATUS FOR REVIEWING DEFECTS
- Publication number 20090252403
- Publication date Oct 8, 2009
- Minoru Harada
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DEFECT INSPECTION TOOL AND METHOD OF PARAMETER TUNING FOR DEFECT IN...
- Publication number 20090222753
- Publication date Sep 3, 2009
- Kohei YAMAGUCHI
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
REVIEW METHOD AND REVIEW DEVICE
- Publication number 20090206259
- Publication date Aug 20, 2009
- Hitachi High-Technologies Corporation
- Kenji Obara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SCANNING MICROSCOPE
- Publication number 20090202166
- Publication date Aug 13, 2009
- Hitachi High-Technologies Corporation
- Kohei Yamaguchi
- G01 - MEASURING TESTING
Information Patent Application
PATTERN DEFECT ANALYSIS EQUIPMENT, PATTERN DEFECT ANALYSIS METHOD A...
- Publication number 20090180680
- Publication date Jul 16, 2009
- Hitachi High-Technologies Corporation
- Norio Satou
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
POWER SUPPLY CIRCUIT AND TEST APPARATUS
- Publication number 20090179652
- Publication date Jul 16, 2009
- Advantest Corporation
- Kenji OBARA
- G01 - MEASURING TESTING
Information Patent Application
INSPECTION METHOD FOR SEMICONDUCTOR WAFER AND APPARATUS FOR REVIEWI...
- Publication number 20090121152
- Publication date May 14, 2009
- Hitachi High-Technologies Corporation
- Kenji Obara
- G01 - MEASURING TESTING
Information Patent Application
Method and system for observing a specimen using a scanning electro...
- Publication number 20090084953
- Publication date Apr 2, 2009
- Hitachi High-Technologies Corporation
- Minoru Harada
- G01 - MEASURING TESTING

Kenji Obara

Person

Patents Grantslast 30 patents

Charged particle beam system, method for determining range for auto...

Charged-particle radiation apparatus

Defect analysis assistance device, program executed by defect analy...

Region-of-interest determination apparatus, observation tool or ins...

Charged particle beam device and method for analyzing defect therein

Charged particle beam apparatus

Charged particle beam apparatus that performs image classification...

Charged particle beam apparatus

Surface observation apparatus and surface observation method

Observation method and observation device

Charged particle beam device, defect observation device, and manage...

Method and apparatus for reviewing defects

Defect observation method and defect observation apparatus

Defect review system and method, and program

Inspecting method, inspecting system, and method for manufacturing...

Method and apparatus for reviewing defects

Inspection method for semiconductor wafer and apparatus for reviewi...

Pattern defect analysis equipment, pattern defect analysis method a...

Scanning electron microscope

Defect inspection tool and method of parameter tuning for defect in...

Pattern defect analysis equipment, pattern defect analysis method a...

Method and its apparatus for reviewing defects

Defect review apparatus and method of reviewing defects

Review method and review device

Method and system for observing a specimen using a scanning electro...

Defect review and classification system

Scanning microscope

Defect review apparatus and method of reviewing defects

Power supply circuit

Scanning electron microscope

Patents Applicationslast 30 patents

Charged Particle Beam System, Method for Determining Range for Auto...

CHARGED PARTICLE BEAM DEVICE AND METHOD FOR ANALYZING DEFECT THEREIN

Charged-Particle Radiation Apparatus

CHARGED PARTICLE BEAM APPARATUS

CHARGED PARTICLE BEAM APPARATUS

DEFECT ANALYSIS ASSISTANCE DEVICE, PROGRAM EXECUTED BY DEFECT ANALY...

REGION-OF-INTEREST DETERMINATION APPARATUS, OBSERVATION TOOL OR INS...

CHARGED PARTICLE BEAM APPARATUS THAT PERFORMS IMAGE CLASSIFICATION...

INSPECTION METHOD FOR SEMICONDUCTOR WAFER AND APPARATUS FOR REVIEWI...

INSPECTION METHOD FOR SEMICONDUCTOR WAFER AND APPARATUS FOR REVIEWI...

CHARGED PARTICLE BEAM DEVICE, DEFECT OBSERVATION DEVICE, AND MANAGE...

METHOD AND APPARATUS FOR REVIEWING DEFECTS

OBSERVATION METHOD AND OBSERVATION DEVICE

PATTERN DEFECT ANALYSIS EQUIPMENT, PATTERN DEFECT ANALYSIS METHOD A...

SURFACE OBSERVATION APPARATUS AND SURFACE OBSERVATION METHOD

DEFECT OBSERVATION METHOD AND DEFECT OBSERVATION APPARATUS

DEFECT OBSERVATION DEVICE AND DEFECT OBSERVATION METHOD

DEFECT REVIEW SYSTEM AND METHOD, AND PROGRAM

Defect Review Apparatus and Method of Reviewing Defects

SCANNING ELECTRON MICROSCOPE

AUTOMATIC DEFECT REVIEW AND CLASSIFICATION SYSTEM

METHOD AND APPARATUS FOR REVIEWING DEFECTS

METHOD AND ITS APPARATUS FOR REVIEWING DEFECTS

DEFECT INSPECTION TOOL AND METHOD OF PARAMETER TUNING FOR DEFECT IN...

REVIEW METHOD AND REVIEW DEVICE

SCANNING MICROSCOPE

PATTERN DEFECT ANALYSIS EQUIPMENT, PATTERN DEFECT ANALYSIS METHOD A...

POWER SUPPLY CIRCUIT AND TEST APPARATUS

INSPECTION METHOD FOR SEMICONDUCTOR WAFER AND APPARATUS FOR REVIEWI...

Method and system for observing a specimen using a scanning electro...