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Kenji Okatani

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  • Tokyo, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Sputtering apparatus and film forming method
    • Patent number 7,156,961
    • Issue date Jan 2, 2007
    • Anelva Corporation
    • Kenji Okatani
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

  • Information Patent Application

    Sputtering apparatus and film forming method
    • Publication number 20030079984
    • Publication date May 1, 2003
    • Kenji Okatani
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...