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Kenji Okazaki
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Tokyo, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Wafer processing method
Patent number
12,094,776
Issue date
Sep 17, 2024
Disco Corporation
Susumu Yokoo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of processing wafer
Patent number
10,177,004
Issue date
Jan 8, 2019
Disco Corporation
Yoshio Watanabe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Processing method for workpiece
Patent number
10,115,636
Issue date
Oct 30, 2018
Disco Corporation
Yoshiteru Nishida
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma etching apparatus
Patent number
9,653,357
Issue date
May 16, 2017
Disco Corporation
Junichi Arami
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wafer processing method
Patent number
9,330,976
Issue date
May 3, 2016
Disco Corporation
Susumu Yakoo
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
WAFER PROCESSING METHOD
Publication number
20220102215
Publication date
Mar 31, 2022
Disco Corporation
Susumu YOKOO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF PROCESSING WAFER
Publication number
20180269068
Publication date
Sep 20, 2018
Disco Corporation
Yoshio Watanabe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROCESSING METHOD FOR WORKPIECE
Publication number
20160042962
Publication date
Feb 11, 2016
Disco Corporation
Yoshiteru Nishida
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
WAFER PROCESSING METHOD
Publication number
20160042996
Publication date
Feb 11, 2016
Disco Corporation
Susumu Yakoo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA ETCHING APPARATUS
Publication number
20150020973
Publication date
Jan 22, 2015
Disco Corporation
Junichi Arami
H01 - BASIC ELECTRIC ELEMENTS