Kenji Sakamoto

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for producing epitaxial wafer
- Patent number 10,640,883
- Issue date May 5, 2020
- Sumco Corporation
- Kenji Sakamoto
- C30 - CRYSTAL GROWTH

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR PRODUCING EPITAXIAL WAFER
- Publication number 20120174859
- Publication date Jul 12, 2012
- Kenji Sakamoto
- C30 - CRYSTAL GROWTH