Kenji Satoh

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Gunma-ken, JP

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Patents Grantslast 30 patents

Information Patent Grant
Heating apparatus which has electrostatic adsorption function, and...
- Patent number 6,953,918
- Issue date Oct 11, 2005
- Shin-Etsu Chemical Co., Ltd.
- Shoji Kano
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Pyrolytic boron nitride double container and manufacture thereof
- Patent number 6,924,012
- Issue date Aug 2, 2005
- Shin-Etsu Chemical Co., Ltd.
- Noboru Kimura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Shower plate for plasma processing apparatus and plasma processing...
- Publication number 20050258280
- Publication date Nov 24, 2005
- SHIN-ETSU CHEMICAL CO., LTD.
- Keiichi Goto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Heating apparatus which has electrostatic adsorption function, and...
- Publication number 20040108314
- Publication date Jun 10, 2004
- Shin-Etsu Chemical Co., Ltd.
- Shoji Kano
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Pyrolytic boron nitride double container and manufacter thereof
- Publication number 20010019750
- Publication date Sep 6, 2001
- Shin-Etsu Chemical Co., Ltd.
- Noboru Kimura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...