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Kenji Shinma

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  • Itami-shi, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Wafer holding body
    • Patent number 12,033,880
    • Issue date Jul 9, 2024
    • Sumitomo Electric Industries, Ltd.
    • Koichi Kimura
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Wafer holding unit
    • Patent number 10,886,157
    • Issue date Jan 5, 2021
    • Sumitomo Electric Industries, Ltd.
    • Koichi Kimura
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Substrate processing apparatus
    • Patent number 7,361,230
    • Issue date Apr 22, 2008
    • Sumitomo Electric Industries, Ltd
    • Masuhiro Natsuhara
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Heater and heating device
    • Patent number 7,342,204
    • Issue date Mar 11, 2008
    • Sumitomo Electric Industries, Ltd.
    • Masuhiro Natsuhara
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Grant

    Aluminum nitride sintered body
    • Patent number 7,306,858
    • Issue date Dec 11, 2007
    • Sumitomo Electric Industries, Ltd.
    • Masuhiro Natsuhara
    • Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
  • Information Patent Grant

    Semiconductor manufacturing apparatus
    • Patent number 7,279,048
    • Issue date Oct 9, 2007
    • Sumitomo Electric Industries, Ltd.
    • Kenji Shinma
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Semiconductor heating apparatus
    • Patent number 7,268,322
    • Issue date Sep 11, 2007
    • Sumitomo Electric Industries, Ltd.
    • Akira Kuibira
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Heater member for mounting heating object and substrate processing...
    • Patent number 6,653,604
    • Issue date Nov 25, 2003
    • Sumitomo Electric Industries, Ltd.
    • Masuhiro Natsuhara
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Sealed airtight container for optical-semiconductors and optical-se...
    • Patent number 6,599,034
    • Issue date Jul 29, 2003
    • Sumitomo Electric Industries, Ltd.
    • Nobuyoshi Tatoh
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents