Kenji SHIRAKO

Person

Toyama, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 11,935,762
- Issue date Mar 19, 2024
- Kokusai Electric Corporation
- Daigi Kamimura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
- Patent number 11,450,536
- Issue date Sep 20, 2022
- Kokusai Electric Corporation
- Daigi Kamimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 11,124,873
- Issue date Sep 21, 2021
- Kokusai Electric Corporation
- Takayuki Nakada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 10,837,112
- Issue date Nov 17, 2020
- Kokusai Electric Corporation
- Yasuaki Komae
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, and method of manufacturing semicon...
- Patent number 10,590,531
- Issue date Mar 17, 2020
- Kokusai Electric Corporation
- Kenji Shirako
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 10,550,468
- Issue date Feb 4, 2020
- Kokusai Electric Corporation
- Takayuki Nakada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus capable of switching control mode of...
- Patent number 9,418,881
- Issue date Aug 16, 2016
- Hitachi Kokusai Electric Inc.
- Shinobu Sugiura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
- Patent number 9,222,732
- Issue date Dec 29, 2015
- HITACHI KOKUSAI ELECTRIC INC.
- Kenji Shirako
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus including shielding unit for suppres...
- Patent number 9,084,298
- Issue date Jul 14, 2015
- Hitachi Kokusai Electric Inc.
- Yukitomo Hirochi
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Heat treatment apparatus
- Patent number 9,074,284
- Issue date Jul 7, 2015
- Hitachi Kokusai Electric, Inc.
- Masanao Fukuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus with an insulator disposed in the re...
- Patent number 8,771,416
- Issue date Jul 8, 2014
- Hitachi Kokusai Electric Inc.
- Shuhei Saido
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20240224238
- Publication date Jul 4, 2024
- Kokusai Electric Corporation
- Daigi KAMIMURA
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...
- Publication number 20220392783
- Publication date Dec 8, 2022
- Kokusai Electric Corporation
- Daigi KAMIMURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...
- Publication number 20220068687
- Publication date Mar 3, 2022
- Kokusai Electric Corporation
- Kenji SHIRAKO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...
- Publication number 20210305067
- Publication date Sep 30, 2021
- Kokusai Electric Corporation
- Daigi KAMIMURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20210254211
- Publication date Aug 19, 2021
- Kokusai Electric Corporation
- Takayuki NAKADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20200131631
- Publication date Apr 30, 2020
- Kokusai Electric Corporation
- Takayuki NAKADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, AND METHOD OF MANUFACTURING SEMICON...
- Publication number 20200071821
- Publication date Mar 5, 2020
- Kokusai Electric Corporation
- Kenji SHIRAKO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20170218513
- Publication date Aug 3, 2017
- Hitachi Kokusai Electric Inc.
- Takayuki NAKADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20170198397
- Publication date Jul 13, 2017
- Hitachi Kokusai Electric Inc.
- Yasuaki KOMAE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD, AND SEMICONDUCTOR DEVICE...
- Publication number 20120214317
- Publication date Aug 23, 2012
- Hitachi Kokusai Electric Inc.
- Masaki Murobayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SUBSTRATE,...
- Publication number 20120156886
- Publication date Jun 21, 2012
- Hitachi Kokusai Electric Inc.
- Kenji Shirako
- C30 - CRYSTAL GROWTH
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, TEMPERATURE CONTROLLING METHOD OF S...
- Publication number 20120094010
- Publication date Apr 19, 2012
- Hitachi Kokusai Electric Inc.
- Shinobu SUGIURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...
- Publication number 20120067869
- Publication date Mar 22, 2012
- Hitachi Kokusai Electric Inc.
- Kenji SHIRAKO
- C30 - CRYSTAL GROWTH
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20110210118
- Publication date Sep 1, 2011
- Hitachi Kokusai Electric Inc.
- Yukitomo HIROCHI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
HEAT TREATMENT APPARATUS
- Publication number 20110204036
- Publication date Aug 25, 2011
- Hitachi Kokusai Electric Inc.
- Masaki MUROBAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEAT TREATMENT APPARATUS
- Publication number 20110056434
- Publication date Mar 10, 2011
- Hitachi Kokusai Electric Inc.
- Takatomo YAMAGUCHI
- C30 - CRYSTAL GROWTH
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, METHOD OF MANUFACTURI...
- Publication number 20110000425
- Publication date Jan 6, 2011
- Hitachi Kokusai Electric Inc.
- Shuhei Saido
- C30 - CRYSTAL GROWTH
Information Patent Application
HEAT TREATMENT APPARATUS
- Publication number 20100275848
- Publication date Nov 4, 2010
- Hitachi Kokusai Electric Inc.
- Masanao Fukuda
- C30 - CRYSTAL GROWTH
Information Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS
- Publication number 20100224128
- Publication date Sep 9, 2010
- Hitachi Kokusai Electric Inc.
- Takatomo YAMAGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THIN FILM FORMING APPARATUS
- Publication number 20080179186
- Publication date Jul 31, 2008
- Kazuhiro Shimura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Kenji SHIRAKO

Person

Patents Grantslast 30 patents

Substrate processing apparatus, method of manufacturing semiconduct...

Substrate processing apparatus and method of manufacturing semicond...

Substrate processing apparatus

Substrate processing apparatus

Substrate processing apparatus, and method of manufacturing semicon...

Substrate processing apparatus

Substrate processing apparatus capable of switching control mode of...

Substrate processing apparatus and method of manufacturing semicond...

Substrate processing apparatus including shielding unit for suppres...

Heat treatment apparatus

Substrate processing apparatus with an insulator disposed in the re...

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...

SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...

SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS, AND METHOD OF MANUFACTURING SEMICON...

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND METHOD, AND SEMICONDUCTOR DEVICE...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SUBSTRATE,...

SUBSTRATE PROCESSING APPARATUS, TEMPERATURE CONTROLLING METHOD OF S...

SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

HEAT TREATMENT APPARATUS

HEAT TREATMENT APPARATUS

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, METHOD OF MANUFACTURI...

HEAT TREATMENT APPARATUS

SEMICONDUCTOR MANUFACTURING APPARATUS

THIN FILM FORMING APPARATUS