Kenji Shirasaka

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Tokyo-To, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method of lowering temperature of substrate table, computer-readabl...
- Patent number 9,070,728
- Issue date Jun 30, 2015
- Tokyo Electron Limited
- Kenichi Kobayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF LOWERING TEMPERATURE OF SUBSTRATE TABLE, COMPUTER-READABL...
- Publication number 20110114298
- Publication date May 19, 2011
- TOKYO ELECTRON LIMITED
- Kenichi KOBAYASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...