Kenji Sudou

Person

Hyogo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Manufacturing method of sample table
- Patent number 10,896,842
- Issue date Jan 19, 2021
- Tokyo Electron Limited
- Wataru Yoshikawa
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Plasma processing method and plasma processing apparatus
- Patent number 9,324,542
- Issue date Apr 26, 2016
- Tokyo Electron Limited
- Naoki Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and gas supply member support device
- Patent number 8,663,424
- Issue date Mar 4, 2014
- Tokyo Electron Limited
- Naoki Mihara
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
MANUFACTURING METHOD OF SAMPLE TABLE
- Publication number 20180286740
- Publication date Oct 4, 2018
- TOKYO ELECTRON LIMITED
- Wataru YOSHIKAWA
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Application
PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20150228459
- Publication date Aug 13, 2015
- TOKYO ELECTRON LIMITED
- Naoki Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SAMPLE TABLE AND MICROWAVE PLASMA PROCESSING APPARATUS
- Publication number 20120211165
- Publication date Aug 23, 2012
- TOKYO ELECTRON LIMITED
- Wataru Yoshikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND GAS SUPPLY MEMBER SUPPORT DEVICE
- Publication number 20110308733
- Publication date Dec 22, 2011
- TOKYO ELECTRON LIMITED
- Naoki Mihara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS SUPPLY MEMBER, PLASMA PROCESSING APPARATUS, AND METHOD OF MANUF...
- Publication number 20110186226
- Publication date Aug 4, 2011
- TOKYO ELECTRON LIMITED
- Kenji Sudou
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EVAPORATING APPARATUS, EVAPORATING METHOD AND MANUFACTURING METHOD...
- Publication number 20100104751
- Publication date Apr 29, 2010
- TOKYO ELECTRON LIMITED
- Kenji Sudou
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EVAPORATING APPARATUS, APPARATUS FOR CONTROLLING EVAPORATING APPARA...
- Publication number 20100092665
- Publication date Apr 15, 2010
- TOKYO ELECTRON LIMITED
- Kenji Sudou
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Kenji Sudou

Person

Patents Grantslast 30 patents

Manufacturing method of sample table

Plasma processing method and plasma processing apparatus

Plasma processing apparatus and gas supply member support device

Patents Applicationslast 30 patents

MANUFACTURING METHOD OF SAMPLE TABLE

PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS

SAMPLE TABLE AND MICROWAVE PLASMA PROCESSING APPARATUS

PLASMA PROCESSING APPARATUS AND GAS SUPPLY MEMBER SUPPORT DEVICE

GAS SUPPLY MEMBER, PLASMA PROCESSING APPARATUS, AND METHOD OF MANUF...

EVAPORATING APPARATUS, EVAPORATING METHOD AND MANUFACTURING METHOD...

EVAPORATING APPARATUS, APPARATUS FOR CONTROLLING EVAPORATING APPARA...